公开(公告)号：US20240024912A1

公开(公告)日：2024-01-25

申请号：US18043359

申请日：2021-08-18

Applicant: TORAY ENGINEERING CO., LTD.

Inventor： Kazunori MAEDA ,  Kenji KITAJIMA ,  Atsushi WATANABE ,  Masashi MOTOI

IPC: B05C5/02 ,  B05C11/10

CPC classification number: B05C5/0258 ,  B05C5/0262 ,  B05C11/10

Abstract: A coating device comprises a die with a slit that is longer in a width direction and discharges a coating liquid to form a coating film on a substrate, a first flow path that supplies the coating liquid toward the die, a first manifold that is linked to the first flow path and holds the coating liquid that flows in from the first flow path, a plurality of second flow paths that are linked to the first manifold, a second manifold that is linked to the second flow paths and the slit, is longer in the width direction, and holds the coating liquid that flows in from the second flow paths, and an adjustment unit that is provided along at least one of the second flow paths and adjusts a flow of the coating liquid flowing through the at least one of the second flow paths.