公开(公告)号：US09823197B2

公开(公告)日：2017-11-21

申请号：US14433972

申请日：2013-10-04

Applicant: Toray Industries, Inc.

Inventor： Kunihisa Nagino ,  Syunpei Yoshikawa

IPC: G01N33/48 ,  G01N33/50 ,  G01N21/64 ,  G06F17/10

CPC classification number: G01N21/6486 ,  G01N21/6452 ,  G01N21/6456 ,  G01N2021/6441 ,  G01N2201/0461 ,  G06F17/10

Abstract: A detecting method includes irradiating a substrate having a concave and convex shape, with laser light collected by a lens; and detecting a height difference of the concave and convex shape by acquiring light intensity of reflected light and/or scattered light from the substrate as image data, and a light irradiation surface of the substrate is arranged at a position closer to the lens than a focal position of the lens is, reflected light and/or scattered light from the light irradiation surface is received as detected light, and a height difference of the substrate is detected based on a change in intensity of the received light.

公开(公告)号：US20150276604A1

公开(公告)日：2015-10-01

申请号：US14433972

申请日：2013-10-04

Applicant: TORAY INDUSTRIES, INC.

Inventor： Kunihisa Nagino ,  Syunpei Yoshikawa

IPC: G01N21/64

CPC classification number: G01N21/6486 ,  G01N21/6452 ,  G01N21/6456 ,  G01N2021/6441 ,  G01N2201/0461 ,  G06F17/10

Abstract: A detecting method includes irradiating a substrate having a concave and convex shape, with laser light collected by a lens; and detecting a height difference of the concave and convex shape by acquiring light intensity of reflected light and/or scattered light from the substrate as image data, and a light irradiation surface of the substrate is arranged at a position closer to the lens than a focal position of the lens is, reflected light and/or scattered light from the light irradiation surface is received as detected light, and a height difference of the substrate is detected based on a change in intensity of the received light.

Abstract translation: 检测方法包括用透镜收集的激光照射具有凹凸形状的基板; 并且通过从基板获取反射光和/或散射光的光强度作为图像数据来检测凹凸形状的高度差，并且将基板的光照射表面布置在比焦点更靠近透镜的位置 作为透镜的位置，作为检测光接收来自光照射面的反射光和/或散射光，并且基于接收光的强度的变化来检测基板的高度差。