公开(公告)号：US20140071582A1

公开(公告)日：2014-03-13

申请号：US14021205

申请日：2013-09-09

Applicant: TOTO LTD.

Inventor： Kazuki ANADA ,  Takuma WADA

IPC: H02N13/00

CPC classification number: H02N13/00 ,  H01L21/6833

Abstract: To provide an electrostatic chuck, including: a ceramic dielectric substrate having a first major surface on which an object to be processed is mounted, and a second major surface on a side opposite the first major surface, the ceramic dielectric substrate being a polycrystalline ceramic sintered body; and an electrode layer interposed between the first major surface and the second major surface of the ceramic dielectric substrate, the electrode layer being integrally sintered with the ceramic dielectric substrate, a temperature control plate provided on the second major surface side; and a heater provided between the electrode layer and the temperature control plate, and the first dielectric layer and the second dielectric layer of the ceramic dielectric substrate having an infrared spectral transmittance in terms of a thickness of 1 mm of not less than 20%.

Abstract translation: 为了提供一种静电卡盘，其特征在于，包括：陶瓷电介质基板，其具有安装有被加工物的第一主面和与所述第一主面相反的一侧的第二主面，所述陶瓷电介质基板为多晶陶瓷烧结体 身体; 以及插入在所述陶瓷电介质基板的所述第一主表面和所述第二主表面之间的电极层，所述电极层与所述陶瓷电介质基板一体烧结，设置在所述第二主表面侧的温度控制板; 以及设置在电极层和温度控制板之间的加热器，陶瓷电介质基板的第一介质层和第二电介质层的厚度为1mm以上，红外光谱透射率为20％以上。

公开(公告)号：US20140063681A1

公开(公告)日：2014-03-06

申请号：US14012003

申请日：2013-08-28

Applicant: TOTO LTD.

Inventor： Kazuki ANADA ,  Takuma WADA

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H01L21/68757

Abstract: To provide an electrostatic chuck, including: a ceramic dielectric substrate having a first major surface on which an object to be processed is mounted, and a second major surface on a side opposite the first major surface, the ceramic dielectric substrate being a polycrystalline ceramic sintered body; and an electrode layer interposed between the first major surface and the second major surface of the ceramic dielectric substrate, the electrode layer being integrally sintered with the ceramic dielectric substrate, the ceramic dielectric substrate including a first dielectric layer between the electrode layer and the first major surface, and a second dielectric layer between the electrode layer and the second major surface, and at least the first dielectric layer of the ceramic dielectric substrate having an infrared spectral transmittance in terms of a thickness of 1 millimeter (mm) of not less than 20%.

Abstract translation: 为了提供一种静电卡盘，其特征在于，包括：陶瓷电介质基板，其具有安装有被加工物的第一主面和与所述第一主面相反的一侧的第二主面，所述陶瓷电介质基板为多晶陶瓷烧结体 身体; 以及插入在所述陶瓷电介质基板的所述第一主表面和所述第二主表面之间的电极层，所述电极层与所述陶瓷电介质基板一体烧结，所述陶瓷电介质基板包括在所述电极层与所述第一主体之间的第一电介质层 表面和第二电介质层之间，并且至少陶瓷电介质基板的第一电介质层的厚度为1毫米（mm）的红外光谱透射率不小于20 ％。

公开(公告)号：US20180261486A1

公开(公告)日：2018-09-13

申请号：US15534798

申请日：2015-12-10

Applicant: TOTO LTD.

Inventor： Kazuki ANADA ,  Yuichi YOSHII

IPC: H01L21/683 ,  H01L21/67

CPC classification number: H01L21/6833 ,  B23B31/28 ,  H01L21/67103 ,  H01L21/67109 ,  H01L21/67248 ,  H01L21/6831 ,  Y10T279/23

Abstract: An electrostatic chuck includes a ceramic dielectric substrate having a first major surface on which an object to be processed is mounted, and a second major surface, the ceramic dielectric substrate being a polycrystalline ceramic sintered body, an electrode layer provided on the ceramic dielectric substrate, a base plate provided on a side of the second major surface and supporting the ceramic dielectric substrate, and a heater provided between the electrode layer and the base plate. The base plate includes a through hole piercing the base plate and a communication path passing a medium adjusting a temperature of the object to be processed, and when viewed in a direction perpendicular to the first major surface, at least a part of the heater exists on a side of the through hole as viewed from a first portion of the communication path which is closest to the through hole.

公开(公告)号：US20150279714A1

公开(公告)日：2015-10-01

申请号：US14663526

申请日：2015-03-20

Applicant: TOTO LTD.

Inventor： Kosuke YAMAGUCHI ,  Kazuki ANADA ,  Tatsuya KOGA ,  Hiroki MATSUI

IPC: H01L21/683 ,  H02N13/00

CPC classification number: H01L21/6833 ,  H01L21/6831 ,  H01L21/68757 ,  H01L2221/683 ,  H02N13/00 ,  Y10T279/23 ,  Y10T279/33

Abstract: According to an aspect of the invention, there is provided an electrostatic chuck including: a ceramic dielectric substrate having a first major surface, a second major surface, and a through-hole; a metallic base plate which has a gas introduction path that communicates with the through-hole; and a bonding layer which is provided between the ceramic dielectric substrate and the base plate and includes a resin material, the bonding layer having a space which is provided between an opening of the through-hole in the second major surface and the gas introduction path and is larger than the opening in a horizontal direction, and a first area in which an end face of the bonding layer on a side of the space intersects with the second major surface being recessed from the opening further than another second area of the end face which is different from the first area.

Abstract translation: 根据本发明的一个方面，提供了一种静电卡盘，其包括：具有第一主表面，第二主表面和通孔的陶瓷电介质基板; 金属基板，其具有与通孔连通的气体导入路径; 以及接合层，其设置在所述陶瓷电介质基板和所述基板之间并且包括树脂材料，所述接合层具有设置在所述第二主表面中的通孔的开口和所述气体引入路径之间的空间， 大于所述开口部的水平方向，并且所述接合层的与所述第二主面相交的端面的端面比所述端面的另一第二区域从所述开口凹进的第一区域， 与第一个区域不同。

公开(公告)号：US20140063682A1

公开(公告)日：2014-03-06

申请号：US14012058

申请日：2013-08-28

Applicant: TOTO Ltd.

Inventor： Kazuki ANADA ,  Takuma WADA

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H01L21/68757

Abstract: To provide an electrostatic chuck, including: a ceramic dielectric substrate having a first major surface on which an object to be processed is mounted, and a second major surface on a side opposite the first major surface, the ceramic dielectric substrate being a polycrystalline ceramic sintered body; and an electrode layer interposed between the first major surface and the second major surface of the ceramic dielectric substrate, the electrode layer being integrally sintered with the ceramic dielectric substrate, and the electrode layer includes a first portion having conductivity, and a second portion that bonds the first dielectric layer and the second dielectric layer, and the mean grain size of crystals included in the second portion is smaller than the mean grain size of crystals included in the ceramic dielectric substrate.

Abstract translation: 为了提供一种静电卡盘，其特征在于，包括：陶瓷电介质基板，其具有安装有被加工物的第一主面和与所述第一主面相反的一侧的第二主面，所述陶瓷电介质基板为多晶陶瓷烧结体 身体; 以及插入在所述陶瓷电介质基板的所述第一主表面和所述第二主表面之间的电极层，所述电极层与所述陶瓷电介质基板一体烧结，所述电极层包括具有导电性的第一部分， 第一介电层和第二介电层以及包含在第二部分中的晶体的平均晶粒尺寸小于包括在陶瓷电介质基板中的晶体的平均晶粒尺寸。

公开(公告)号：US20180040499A1

公开(公告)日：2018-02-08

申请号：US15788132

申请日：2017-10-19

Applicant: TOTO LTD.

Inventor： Kazuki ANADA ,  Yuichi YOSHII ,  Takuma WADA

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H01L21/67103 ,  H01L21/67109 ,  H01L21/6831 ,  H01L21/68735

Abstract: According to one embodiment, an electrostatic chuck includes a ceramic dielectric substrate including a sealing ring provided at a peripheral edge portion of the ceramic dielectric substrate, and an electrode layer including a plurality of electrode components. An outer perimeter of the ceramic dielectric substrate is provided to cause a spacing between the outer perimeter of the ceramic dielectric substrate and an outer perimeter of the electrode layer to be uniform. The spacing between the outer perimeter of the electrode layer and the outer perimeter of the ceramic dielectric substrate is narrower than a spacing of the electrode components. A width of the sealing ring is not less than 0.3 millimeters and not more than 3 millimeters. A width where the electrode layer overlaps the sealing ring is not less than −0.7 millimeters and not more than 2 millimeters.

公开(公告)号：US20170178944A1

公开(公告)日：2017-06-22

申请号：US15452330

申请日：2017-03-07

Applicant: TOTO LTD.

Inventor： Kosuke YAMAGUCHI ,  Kazuki ANADA ,  Tatsuya KOGA ,  Hiroki MATSUI

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H01L21/6831 ,  H01L21/68757 ,  H01L2221/683 ,  H02N13/00 ,  Y10T279/23 ,  Y10T279/33

Abstract: An electrostatic chuck includes: a ceramic dielectric substrate having a first major surface, a second major surface, and a through-hole; a metallic base plate which has a gas introduction path that communicates with the through-hole; and a bonding layer which is provided between the ceramic dielectric substrate and the base plate and includes a resin material. The bonding layer has a space which is provided between an opening of the through-hole in the second major surface and the gas introduction path and is larger than the opening in a horizontal direction, and a first area in which an end face of the bonding layer on a side of the space intersects with the second major surface being recessed from the opening further than a second area of the end face which is different from the first area.

公开(公告)号：US20160276198A1

公开(公告)日：2016-09-22

申请号：US14777879

申请日：2014-03-27

Applicant: TOTO LTD.

Inventor： Kazuki ANADA ,  Yuichi YOSHII

IPC: H01L21/683

CPC classification number: H01L21/6833 ,  H01L21/67109 ,  H01L21/6831 ,  Y10T279/23

Abstract: According to an aspect of an embodiment of the invention, there is provided an electrostatic chuck including: a ceramic dielectric substrate including a first major surface for mounting a clamped target, a second major surface on opposite side from the first major surface, and a through hole provided from the second major surface to the first major surface; a metallic base plate supporting the ceramic dielectric substrate and including a gas feed channel communicating with the through hole; and an insulator plug including a ceramic porous body provided in the gas feed channel and a ceramic insulating film provided between the ceramic porous body and the gas feed channel and being denser than the ceramic porous body, the ceramic insulating film biting into the ceramic porous body from a surface of the ceramic porous body.

Abstract translation: 根据本发明的实施例的一个方面，提供了一种静电卡盘，其包括：陶瓷电介质基板，包括用于安装夹持的目标的第一主表面，与第一主表面相对的第二主表面，以及通孔 孔，从第二主表面提供到第一主表面; 支撑陶瓷电介质基板的金属底板，并且包括与通孔连通的气体供给通道; 以及绝缘体塞，其包括设置在所述气体供给路径中的陶瓷多孔体和设置在所述陶瓷多孔体和所述气体供给路径之间并且比所述陶瓷多孔体更致密的陶瓷绝缘膜，所述陶瓷绝缘膜咬入所述陶瓷多孔体 从陶瓷多孔体的表面。