公开(公告)号：US20180054575A1

公开(公告)日：2018-02-22

申请号：US15560935

申请日：2016-03-22

Applicant: TechInsights Inc.

Inventor： Christopher PAWLOWICZ ,  Alexander SORKIN ,  Vladimir MARTINCEVIC

IPC: H04N5/357

Abstract: Devices, systems and methods relating to a distortion-correcting imaging for collecting image-related data of a substrate are disclosed, comprising: a beam emitter for directing an emission at an intended location on the substrate, and a signal detector for determining 5 a signal intensity value associated with the emission; wherein the signal intensity value is associated with a corrected substrate location, said corrected substrate location determined from the intended substrate location and a correction factor, said correction factor being a function of said intended substrate location.