公开(公告)号：US20130098866A1

公开(公告)日：2013-04-25

申请号：US13681613

申请日：2012-11-20

Applicant: The Charles Stark Draper Laboratory, Inc.

Inventor： David J. Carter ,  Marc S. Weinberg ,  Eugene Cook ,  Peter Miraglia

IPC: F16C33/04

CPC classification number: B81C1/00198 ,  B81B2201/0242 ,  B81B2201/034 ,  F04B19/006 ,  F04D13/00 ,  F04D25/00 ,  F16C33/04 ,  G01C19/06 ,  Y10T74/12

Abstract: In one embodiment, a rotary device includes a multiwall nanotube that extends substantially perpendicularly from a substrate. A rotor may be coupled to an outer wall of the multiwall nanotube, be spaced apart from the substrate, and be free to rotate around an elongate axis of the multiwall nanotube.

公开(公告)号：US10589983B2

公开(公告)日：2020-03-17

申请号：US15698604

申请日：2017-09-07

Applicant: The Government of the United States of America, as Represented by the Secretary of the Navy ,  The Charles Stark Draper Laboratory, Inc.

Inventor： Francis J. Kub ,  Karl D. Hobart ,  Eugene A. Imhoff ,  Rachael L. Myers-Ward ,  Eugene Cook ,  Jonathan Bernstein ,  Marc Weinberg

IPC: B81B3/00 ,  B81C1/00 ,  G01C19/5656 ,  G01C19/5621 ,  G01C19/56 ,  B81B7/00 ,  G01C19/5783

Abstract: Electromechanical device structures are provided, as well as methods for forming them. The device structures incorporate at least a first and second substrate separated by an interface material layer, where the first substrate comprises an anchor material structure and at least one suspended material structure, optionally a spring material structure, and optionally an electrostatic sense electrode. The device structures may be formed by methods that include providing an interface material layer on one or both of the first and second substrates, bonding the interface materials to the opposing first or second substrate or to the other interface material layer, followed by forming the suspended material structure by etching.

公开(公告)号：US08771525B2

公开(公告)日：2014-07-08

申请号：US13681613

申请日：2012-11-20

Applicant: The Charles Stark Draper Laboratory, Inc.

Inventor： David J. Carter ,  Marc S. Weinberg ,  Eugene Cook ,  Peter Miraglia

IPC: C23F1/00 ,  B44C1/22 ,  F16C33/04 ,  B81C1/00 ,  F04B19/00

CPC classification number: B81C1/00198 ,  B81B2201/0242 ,  B81B2201/034 ,  F04B19/006 ,  F04D13/00 ,  F04D25/00 ,  F16C33/04 ,  G01C19/06 ,  Y10T74/12

Abstract: In one embodiment, a rotary device includes a multiwall nanotube that extends substantially perpendicularly from a substrate. A rotor may be coupled to an outer wall of the multiwall nanotube, be spaced apart from the substrate, and be free to rotate around an elongate axis of the multiwall nanotube.

Abstract translation: 在一个实施例中，旋转装置包括从衬底基本上垂直延伸的多壁纳米管。 转子可以耦合到多壁纳米管的外壁，与基底间隔开，并且可以围绕多壁纳米管的细长轴自由旋转。