公开(公告)号：US20220074981A1

公开(公告)日：2022-03-10

申请号：US17469513

申请日：2021-09-08

Applicant: Tokyo Electron Limited

Inventor： Yuto USUKI ,  Takayuki HATANAKA

IPC: G01R27/26 ,  H01L21/67

Abstract: An execution device according to an exemplary embodiment includes an operation device, an acceleration sensor, and an arithmetic device. The operation device is a device for executing a predetermined operation. The acceleration sensor measures acceleration applied to the execution device. The arithmetic device measures an elapsed time after the acceleration measured by the acceleration sensor becomes a value within a reference range, and when a predetermined time elapses while the acceleration remains a value within the reference range, causes the operation device to execute the predetermined operation.

公开(公告)号：US20220341844A1

公开(公告)日：2022-10-27

申请号：US17729000

申请日：2022-04-26

Applicant: Tokyo Electron Limited

Inventor： Yuto USUKI ,  Kippei SUGITA ,  Mitsuru DOHIWA ,  Takashi NIINUMA ,  Hisanori SAKAI

IPC: G01N21/27 ,  G01N21/25

Abstract: A calibration apparatus for calibrating an emission spectroscopy analyzer that monitors plasma generated in a plasma processing apparatus. The calibration apparatus comprises a base substrate; a plurality of light emitting devices disposed on the base substrate, each light emitting device of the plurality of light emitting devices is configured to emit light having different wavelengths from other light emitting devices of the plurality of light emitting devices; a reflector disposed on the base substrate, the reflector configured to reflect the light emitted by the plurality of light emitting devices toward an outside of the base substrate in a plan view; and a control device disposed on the base substrate, the control device configured to control the plurality of light emitting devices.