Waveguide structure and manufacturing method thereof

    公开(公告)号:US09705173B2

    公开(公告)日:2017-07-11

    申请号:US14602290

    申请日:2015-01-22

    CPC classification number: H01P3/003 H01P3/006 H01P3/026 H01P7/086 H01P11/001

    Abstract: A waveguide structure includes a signal line and two static lines. The signal line is disposed between the static lines in a first direction. The static lines and the signal line are disposed parallel to one another. Each static line includes a first conductive pattern, a second conductive pattern, and a third conductive pattern. The first conductive pattern and the signal line are disposed on an identical plane of a dielectric layer. A thickness of the first conductive pattern is substantially equal to a thickness of the signal line. The second conductive pattern is disposed on the first conductive pattern. A width of the first conductive pattern is larger than a width of the second conductive pattern in the first direction. The third conductive pattern is disposed on the second conductive pattern. A width of the third conductive pattern is larger than the width of the second conductive pattern.

    RADIOFREQUENCY FILTER AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20240186271A1

    公开(公告)日:2024-06-06

    申请号:US18094397

    申请日:2023-01-09

    CPC classification number: H01L23/66 H01Q15/24 H01L2223/6605 H01L2223/6688

    Abstract: A radiofrequency filter includes a substrate, an isolation structure, an electrically conductive structure, a spacer structure, a dielectric layer, a patterned electrically conductive film, a first contact structure, and a second contact structure. The isolation structure is disposed in the substrate. The electrically conductive structure is disposed on the isolation structure. The spacer structure is disposed on the substrate and located on a sidewall of the electrically conductive structure. The dielectric layer is disposed on the electrically conductive structure. The patterned electrically conductive film is disposed on the dielectric layer. At least a part of the dielectric layer is located between the electrically conductive structure and the patterned electrically conductive film in a vertical direction. The first contact structure and the second contact structure are disposed on and electrically connected with the patterned electrically conductive film.

    WAVEGUIDE STRUCTURE AND MANUFACTURING METHOD THEREOF
    3.
    发明申请
    WAVEGUIDE STRUCTURE AND MANUFACTURING METHOD THEREOF 有权
    波形结构及其制造方法

    公开(公告)号:US20160197391A1

    公开(公告)日:2016-07-07

    申请号:US14602290

    申请日:2015-01-22

    CPC classification number: H01P3/003 H01P3/006 H01P3/026 H01P7/086 H01P11/001

    Abstract: A waveguide structure includes a signal line and two static lines. The signal line is disposed between the static lines in a first direction. The static lines and the signal line are disposed parallel to one another. Each static line includes a first conductive pattern, a second conductive pattern, and a third conductive pattern. The first conductive pattern and the signal line are disposed on an identical plane of a dielectric layer. A thickness of the first conductive pattern is substantially equal to a thickness of the signal line. The second conductive pattern is disposed on the first conductive pattern. A width of the first conductive pattern is larger than a width of the second conductive pattern in the first direction. The third conductive pattern is disposed on the second conductive pattern. A width of the third conductive pattern is larger than the width of the second conductive pattern.

    Abstract translation: 波导结构包括信号线和两条静态线。 信号线在第一方向上设置在静态线之间。 静态线路和信号线彼此平行设置。 每个静态线包括第一导电图案,第二导电图案和第三导电图案。 第一导电图案和信号线设置在电介质层的相同平面上。 第一导电图案的厚度基本上等于信号线的厚度。 第二导电图案设置在第一导电图案上。 第一导电图案的宽度大于第一导电图案在第一方向上的宽度。 第三导电图案设置在第二导电图案上。 第三导电图案的宽度大于第二导电图案的宽度。

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