公开(公告)号：US20240379670A1

公开(公告)日：2024-11-14

申请号：US18206609

申请日：2023-06-06

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Ya-Ting Hu ,  Chih-Yi Wang ,  Yao-Jhan Wang ,  Wei-Che Chen ,  Kun-Szu Tseng ,  Yun-Yang He ,  Wen-Liang Huang ,  Lung-En Kuo ,  Po-Tsang Chen ,  Po-Chang Lin ,  Ying-Hsien Chen

IPC: H01L27/088 ,  H01L21/762

Abstract: A semiconductor device includes a substrate with a high voltage region and a low voltage region. A first deep trench isolation is disposed within the high voltage region. The first deep trench isolation includes a first deep trench and a first insulating layer filling the first deep trench. The first deep trench includes a first sidewall and a second sidewall facing the first sidewall. The first sidewall is formed by a first plane and a second plane. The edge of the first plane connects to the edge of the second plane. The slope of the first plane is different from the slope of the second plane.

公开(公告)号：US20240413017A1

公开(公告)日：2024-12-12

申请号：US18220839

申请日：2023-07-12

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Chih-Yi Wang ,  Ya-Ting Hu ,  Wei-Che Chen ,  Chang-Yih Chen ,  Kun-Szu Tseng ,  Yao-Jhan Wang

IPC: H01L21/8234 ,  H01L27/088

Abstract: A method for fabricating a semiconductor device includes the steps of providing a substrate having a medium-voltage (MV) region and a low-voltage (LV) region, forming fin-shaped structures on the LV region, forming an insulating layer between the fin-shaped structures, forming a hard mask on the LV region, and then performing a thermal oxidation process to form a gate dielectric layer on the MV region. Preferably, a hump is formed on the substrate surface of the MV region after the hard mask is removed, in which the hump further includes a first hump adjacent to one side of the substrate on the MV region and a second hump adjacent to another side of the substrate on the MV region.

公开(公告)号：US20250015186A1

公开(公告)日：2025-01-09

申请号：US18227299

申请日：2023-07-27

Applicant: UNITED MICROELECTRONICS CORP.

Inventor： Hung-Chun Lee ,  Chih-Yi Wang ,  Wei-Che Chen ,  Ya-Ting Hu ,  Yao-Jhan Wang ,  Kun-Szu Tseng ,  Feng-Yun Cheng ,  Shyan-Liang Chou

IPC: H01L29/78 ,  H01L25/16

Abstract: The invention provides a semiconductor structure, which comprises a middle/high voltage device region and a low voltage device region, a plurality of fin structures disposed in the low voltage device region, and a protruding part located at a boundary Between the middle/high voltage device region and the low voltage device region. A top surface of the protruding part is flat, and the top surface of the protruding part is aligned with a flat top surface of the middle/high voltage device region.