公开(公告)号：US20220011088A1

公开(公告)日：2022-01-13

申请号：US17296117

申请日：2019-11-28

Applicant: UNITY SEMICONDUCTOR

Inventor： Jean-François BOULANGER ,  Isabelle BERGOËND

IPC: G01B9/02 ,  G01B11/06

Abstract: A method for measuring a surface of an object including at least one structure using low coherence optical interferometry, the method including the following steps: acquiring an interferometric signal at a plurality of points, called measurement points, of the surface in a field of view; for at least one measurement point: attributing the interferometric signal acquired to a class of interferometric signals from a plurality of classes, each class being associated with a reference interferometric signal representative of a typical structure; and analysing the interferometric signal to derive therefrom an item of information on the structure at the measurement point, as a function of its class. A measuring system implementing the present method is also provided.

公开(公告)号：US20230251079A1

公开(公告)日：2023-08-10

申请号：US18302151

申请日：2023-04-18

Applicant: UNITY SEMICONDUCTOR

Inventor： Jean-François BOULANGER ,  Isabelle BERGOËND

IPC: G01B9/0209 ,  G01B9/02 ,  G01B11/06

CPC classification number: G01B9/0209 ,  G01B9/02083 ,  G01B11/0625 ,  G01B9/02088 ,  G01B2210/56

Abstract: A method and related system for measuring a surface of a substrate including at least one structure using low coherence optical interferometry, the method being implemented with a system having an interferometric device, a light source, an imaging sensor, and a processing module, and including: —acquiring, with the imaging sensor, an interferometric signal formed by the interferometric device between a reference beam and a measurement beam reflected by the surface at a plurality of measurement points in a field of view; the following steps being carried out by the processing module:



classifying, by a learning technique, the acquired interferometric signals according to a plurality of classes, each class being associated with a reference interferometric signal representative of a typical structure; and
analysing the interferometric signals to derive therefrom information on the structure at the measurement points, as a function of the class of each interferometric signal.