公开(公告)号：US20230048216A1

公开(公告)日：2023-02-16

申请号：US17393451

申请日：2021-08-04

Applicant: UNIVERSITY OF WINDSOR

Inventor： Imran KHAN ,  David S.K. Ting ,  Mohammed Jalal Ahamed

IPC: H03H9/24 ,  H03H9/02 ,  G01C19/5684 ,  B81B7/02

Abstract: A Microelectromechanical systems (MEMS) based ring resonator includes an outer ring which is supported in resilient deformable movement relative to one or more peripherally disposed electrodes by a symmetrically positioned array of radially extending inner spring supports. The inner spring supports extend radially from a central anchor post or support to the inner circumferential edge of the outer ring. The innerspring supports are configured to deformation or regulate movement in outer ring driving and sensing modes.