公开(公告)号：US20240247375A1

公开(公告)日：2024-07-25

申请号：US18625401

申请日：2024-04-03

Applicant: Universal Display Corporation

Inventor： Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Siddharth HARIKRISHNA MOHAN ,  Matthew KING

IPC: C23C16/455 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  H10K71/13

CPC classification number: C23C16/45563 ,  B41J2/00 ,  C23C14/12 ,  C23C14/24 ,  C23C14/243 ,  C23C16/45519 ,  H10K71/135

Abstract: Systems and techniques for depositing organic material on a substrate are provided, in which one or more shield gas flows prevents contamination of the substrate by the chamber ambient. Thus, multiple layers of the same or different materials may be deposited in a single deposition chamber, without the need for movement between different deposition chambers, and with reduced chance of cross-contamination between layers.

公开(公告)号：US20230232697A1

公开(公告)日：2023-07-20

申请号：US18103667

申请日：2023-01-31

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: B41J2/11 ,  B05B12/18

CPC classification number: H10K71/13 ,  B05B12/18 ,  H10K50/11 ,  H10K71/00 ,  H10K2101/10 ,  H10K2101/40

Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

公开(公告)号：US20220302396A1

公开(公告)日：2022-09-22

申请号：US17746351

申请日：2022-05-17

Applicant: Universal Display Corporation

Inventor： Gregg KOTTAS ,  Nasrin Ansari ,  Zeinab Elshenawy ,  Alan DeAngelis ,  Chuanjun Xia

IPC: H01L51/00 ,  C09K11/06 ,  H05B33/14 ,  C07F15/00 ,  H01L51/50 ,  C09K11/02

Abstract: Novel phosphorescent heteroleptic iridium complexes with phenylpyridine and dibenzo-containing ligands are provided. Alkyl substitution at specific positions on the ligands gives rise to compounds with improved OLED properties, including saturated green emission.

公开(公告)号：US20210351385A1

公开(公告)日：2021-11-11

申请号：US17224240

申请日：2021-04-07

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Gregory MCGRAW ,  William E. QUINN

IPC: H01L51/56 ,  H01L51/00 ,  B41J2/14

Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.

公开(公告)号：US20150380648A1

公开(公告)日：2015-12-31

申请号：US14730768

申请日：2015-06-04

Applicant: Universal Display Corporation

Inventor： Gregory McGRAW ,  William E. QUINN ,  Matthew KING ,  Elliot H. HARTFORD, JR. ,  Siddharth Harikrishna MOHAN ,  Benjamin SWEDLOVE ,  Gregg KOTTAS

IPC: H01L51/00 ,  H01L51/56 ,  C23C14/12 ,  C23C14/24 ,  C23C14/54

CPC classification number: C23C14/12 ,  B05D1/60 ,  B41J2/045 ,  B41J2202/02 ,  C23C14/04 ,  C23C14/228 ,  C23C14/54 ,  H01L51/0005 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.

Abstract translation: 所公开的主题的实施例提供了方法和系统，包括喷嘴，要沉积在与喷嘴流体连通的基板上的材料源，与待喷射的材料沉积的材料源流体连通的输送气体源， 与喷嘴相邻设置的排气通道，与喷嘴和排气通道流体连通并且邻近排气通道设置的限制气体源，以及致动器，用于调节喷嘴的沉积喷嘴孔和 沉积目标。 飞高高度分离的调整可能会停止和/或开始从喷嘴沉积材料。

公开(公告)号：US20230112871A1

公开(公告)日：2023-04-13

申请号：US18079976

申请日：2022-12-13

Applicant: Universal Display Corporation

Inventor： Xin XU ,  Gregory MCGRAW ,  William E. QUINN ,  Gregg KOTTAS ,  Jason PAYNTER ,  Julia J. BROWN

IPC: H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a device having a substrate, and a plurality of unit areas of an organic light emitting diode (OLED) display disposed on the substrate. The unit areas may be repeating, area-filling subdivisions on the substrate that each have an anode and a cathode. The organic film may be disposed over portions of the device other than the unit areas. The device may include at least one pixel having a plurality of sub-pixels disposed within each of the plurality of unit areas. The cathode of at least one pixel of each of the plurality of unit areas may be a common cathode.

公开(公告)号：US20220333230A1

公开(公告)日：2022-10-20

申请号：US17854232

申请日：2022-06-30

Applicant: Universal Display Corporation

Inventor： Matthew KING ,  Gregg KOTTAS ,  Gregory MCGRAW ,  William E. QUINN

IPC: C23C14/24 ,  H01L51/56 ,  C23C14/12

Abstract: Embodiments of the disclosed subject matter provide an apparatus having a device with a micronozzle array disposed on a micro-fabricated fluidic die. The device may include a first gas distribution plate and a second opposing plate, where the micro-fabricated fluidic die is disposed between the first gas distribution plate and the second opposing plate, wherein the first gas distribution plate is irreversibly joined to the micronozzle array with a seal that is gas-tight, and where the first gas distribution plate includes a plurality of sealed flow paths. A manifold may be reversibly joined to the first gas distribution plate, where the micro-fabricated fluidic die and the first gas distribution plate and the second opposing plate are disposed between the manifold. A thermally conductive plate may have at least one window that provides a clearance fit for the device across a range of motion relative to the thermally conductive plate.

公开(公告)号：US20210054495A1

公开(公告)日：2021-02-25

申请号：US17082169

申请日：2020-10-28

Applicant: Universal Display Corporation

Inventor： Gregory McGRAW ,  William E. QUINN ,  Matthew KING ,  Elliot H. HARTFORD, JR. ,  Siddharth HARIKRISHNA MOHAN ,  Benjamin SWEDLOVE ,  Gregg KOTTAS

IPC: C23C14/12 ,  C23C14/54 ,  C23C14/22 ,  B41J2/045 ,  C23C14/04

Abstract: Embodiments of the disclosed subject matter provide methods and systems including a nozzle, a source of material to be deposited on a substrate in fluid communication with the nozzle, a delivery gas source in fluid communication with the source of material to be deposited with the nozzle, an exhaust channel disposed adjacent to the nozzle, a confinement gas source in fluid communication with the nozzle and the exhaust channel, and disposed adjacent to the exhaust channel, and an actuator to adjust a fly height separation between a deposition nozzle aperture of the nozzle and a deposition target. The adjustment of the fly height separation may stop and/or start the deposition of the material from the nozzle.

公开(公告)号：US20190386257A1

公开(公告)日：2019-12-19

申请号：US16430486

申请日：2019-06-04

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: H01L51/56 ,  H01L51/00

Abstract: Embodiments of the disclosed subject matter provide a depositor device having a first exhaust aperture and a second exhaust aperture, and a plurality of delivery apertures disposed between the first exhaust aperture and the second exhaust aperture. A first aperture of the plurality of delivery apertures may have a first length, and a second aperture of the plurality of delivery apertures may have a second length. The first length may be longer than the second length. The device may include a third aperture of the plurality of delivery apertures which may have a third length, where the second length may be longer that the third length. The plurality of delivery apertures of the device may include three or more delivery apertures having different lengths.

公开(公告)号：US20190386216A1

公开(公告)日：2019-12-19

申请号：US16400218

申请日：2019-05-01

Applicant: Universal Display Corporation

Inventor： William E. QUINN ,  Gregory MCGRAW ,  Gregg KOTTAS ,  Xin XU ,  Julia J. BROWN

IPC: H01L51/00 ,  B05B12/18 ,  H01L51/50 ,  H01L51/56

Abstract: Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.