公开(公告)号：US20210141133A1

公开(公告)日：2021-05-13

申请号：US17248285

申请日：2021-01-19

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. OCKENFUSS ,  Tim GUSTAFSON ,  Jeffrey James KUNA ,  Markus BILGER ,  Richard A. BRADLEY, JR.

IPC: G02B5/28 ,  H01L27/146 ,  G02B1/10

Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

公开(公告)号：US20230324592A1

公开(公告)日：2023-10-12

申请号：US18312831

申请日：2023-05-05

Applicant: VIAVI Solutions Inc.

Inventor： Scott ROWLANDS ,  Georg J. OCKENFUSS ,  Tim GUSTAFSON ,  Marius GRIGONIS

IPC: G02B5/20 ,  G02B1/115 ,  G02B1/00 ,  C23C14/34 ,  C23C28/00 ,  C23C14/08 ,  C23C14/06 ,  C23C14/10

CPC classification number: G02B5/208 ,  G02B1/115 ,  G02B1/007 ,  C23C14/34 ,  C23C28/345 ,  C23C14/083 ,  C23C14/0694 ,  C23C14/10 ,  C23C14/081 ,  G02B5/20

Abstract: An optical filter may include a set of optical filter layers disposed onto a substrate. The set of optical filter layers may include a first subset of optical filter layers comprising a first material with a first refractive index. The first material may comprise at least silicon and hydrogen. The set of optical filter layers may include a second subset of optical filter layers comprising a second material with a second refractive index. The second material is different from the first material and the second refractive index is less than the first refractive index. The set of optical filter layers may include a third subset of optical filter layers comprising a third material different from the first material and the second material.

公开(公告)号：US20230350116A1

公开(公告)日：2023-11-02

申请号：US18349404

申请日：2023-07-10

Applicant: VIAVI Solutions Inc.

Inventor： Georg J. OCKENFUSS ,  Tim GUSTAFSON ,  Jeffrey James KUNA ,  Markus BILGER ,  Richard A. BRADLEY, Jr.

IPC: G02B5/28 ,  H01L27/146 ,  G02B1/10

CPC classification number: G02B5/285 ,  G02B5/281 ,  G02B5/283 ,  H01L27/14621 ,  H01L27/14685 ,  G02B1/10

Abstract: An optical filter, a sensor device including the optical filter, and a method of fabricating the optical filter are provided. The optical filter includes one or more dielectric layers and one or more metal layers stacked in alternation. The metal layers are intrinsically protected by the dielectric layers. In particular, the metal layers have tapered edges that are protectively covered by one or more of the dielectric layers.

公开(公告)号：US20200209448A1

公开(公告)日：2020-07-02

申请号：US16722325

申请日：2019-12-20

Applicant: VIAVI Solutions Inc.

Inventor： Scott ROWLANDS ,  Georg J. OCKENFUSS ,  Tim GUSTAFSON ,  Marius GRIGONIS

IPC: G02B5/20 ,  G02B1/115 ,  G02B1/00 ,  C23C14/34 ,  C23C14/08 ,  C23C14/06 ,  C23C14/10 ,  C23C28/00

Abstract: An optical filter may include a set of optical filter layers disposed onto a substrate. The set of optical filter layers may include a first subset of optical filter layers comprising a first material with a first refractive index. The first material may comprise at least silicon and hydrogen. The set of optical filter layers may include a second subset of optical filter layers comprising a second material with a second refractive index. The second material is different from the first material and the second refractive index is less than the first refractive index. The set of optical filter layers may include a third subset of optical filter layers comprising a third material different from the first material and the second material.