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公开(公告)号:US20230175973A1
公开(公告)日:2023-06-08
申请号:US17999777
申请日:2021-05-31
Applicant: VIENEX CORPORATION
Inventor: Yukihiro KAGAWA , Osamu IWASAKI
CPC classification number: G01N21/88 , G01N21/4738 , G01N2201/062 , G01N2201/10 , G01N2201/0633
Abstract: According to the present invention, a light source and one pixel unit formed of at least one light reception element among a light reception element array (photodiode array) are provided in a one-to-one correspondence, and a light beam is detected from at least one light reception element (one pixel unit) corresponding to the light source, only when the light source emits light. Therefore, only one collimated or further substantially condensed light beam is incident into “a foreign substance/defect” in an object to be inspected, and only scattered light can be separated by the light reception element and be detected. Accordingly, even when an object to be inspected has a light scattering property and is thick, “a foreign substance/defect” can be detected with a good signal to noise ratio (crosstalk is extremely low).
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公开(公告)号:US20240027750A1
公开(公告)日:2024-01-25
申请号:US18265221
申请日:2021-10-01
Applicant: VIENEX CORPORATION
Inventor: Ryuta WATANABE , Osamu IWASAKI
CPC classification number: G02B26/125 , G02B26/123 , G01N21/8806 , G01N21/8851
Abstract: An optical line sensor reads an inspection object conveyed in a sub-scanning direction by a reading line L extending in a main scanning direction and includes a plurality of light-receiving lenses 11 and a plurality of light-receiving elements. The plurality of light-receiving lenses 11 are arranged along the main scanning direction. The plurality of light-receiving elements are arranged linearly along the main scanning direction, and receive light transmitted through the plurality of light-receiving, lenses 11. The plurality of light-receiving lenses 11 are arranged to be separated from each other by a diameter of the light-receiving lens 11 or longer. A plurality of light-receiving elements 121 form at least one row or more of the reading lines L.
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公开(公告)号:US20230314334A1
公开(公告)日:2023-10-05
申请号:US18011521
申请日:2021-06-15
Applicant: VIENEX CORPORATION
Inventor: Osamu IWASAKI , Yoshihiro KAGAWA
IPC: G01N21/88 , H04N25/701 , H04N23/56 , G01N21/94
CPC classification number: G01N21/8806 , H04N25/701 , G01N2201/0826 , G01N21/94 , G01N2201/0633 , H04N23/56
Abstract: One pixel unit including at least one light receiving element of a light receiving element array (photodiode array) and a light source have a one-to-one correspondence, and only when the light source emits light, the light beam is detected by at least one light receiving element (one pixel unit) corresponding to the light source. An illumination optical system includes a light guiding means for guiding to an inspection object by reducing an interval between optical axes of light beams emitted from a plurality of light sources in an arrangement direction of a plurality of the light sources.
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