公开(公告)号：US20190089325A1

公开(公告)日：2019-03-21

申请号：US16087749

申请日：2017-03-30

Applicant: WASEDA UNIVERSITY

Inventor： Takahiko Yanagitani ,  Masashi Suzuki

IPC: H03H9/02 ,  H03H9/13 ,  H03H9/17 ,  H03H9/56 ,  H03H9/145 ,  H03H9/25 ,  H03H9/64 ,  H01L41/187 ,  H01L41/316 ,  C01B21/072 ,  C23C14/06 ,  C23C14/34

Abstract: A piezoelectric material is described. The piezoelectric material comprises aluminum nitride (AlN) doped with ytterbium (Yb), an atomic percentage of Yb in the AlN being greater than or equal to approximately 10.0% and less than or equal to approximately 27.0%. Piezoelectric layers comprising the piezoelectric material may be used in bulk acoustic wave (BAW) acoustic resonators, and surface acoustic wave (SAW) acoustic resonators. The BAW acoustic resonators and SAW acoustic resonators can be used in a variety of applications.