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公开(公告)号:US09969001B2
公开(公告)日:2018-05-15
申请号:US14964451
申请日:2015-12-09
Applicant: Washington State University
Inventor: Rahul P. Panat , Deuk H. Heo
IPC: B22F3/105 , G06F1/16 , H01F27/24 , H01F27/28 , H01F41/02 , H01F41/04 , H01G4/12 , H01P11/00 , H05K1/02 , H05K1/03 , H05K1/09 , H05K3/14 , H05K3/22 , H05K3/46 , H01G4/002 , B22F3/00 , B33Y10/00 , B33Y50/02 , H05K1/16 , B33Y80/00 , B22F1/00
CPC classification number: B22F3/1055 , B22F1/0018 , B22F3/008 , B22F2003/1058 , B33Y10/00 , B33Y50/02 , B33Y80/00 , C22C2202/02 , G06F1/163 , H01F17/0006 , H01F17/0033 , H01F27/24 , H01F27/2804 , H01F41/0206 , H01F41/046 , H01G4/002 , H01G4/1218 , H01P11/001 , H05K1/028 , H05K1/0283 , H05K1/0296 , H05K1/0313 , H05K1/0393 , H05K1/09 , H05K1/165 , H05K3/14 , H05K3/22 , H05K3/4644 , H05K2201/0162
Abstract: Three-dimensional inductors may comprise a passivation layer disposed on a substrate, a three-dimensional pillar comprising a ferromagnetic material disposed on the substrate or the passivation layer, and a conductive trace wound at least partially around the pillar. Three-dimensional capacitors may comprise a passivation layer disposed on a substrate, at least two support pillars comprising a polymeric material disposed on the passivation layer or the substrate, at least two electrodes disposed between the support pillars, a dielectric disposed between the electrodes, and a metal trace. Methods of manufacturing the three-dimensional passives, such as inductors and capacitors, may comprise direct writing the components and curing them for on-chip applications.
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公开(公告)号:US20160172099A1
公开(公告)日:2016-06-16
申请号:US14964451
申请日:2015-12-09
Applicant: Washington State University
Inventor: Rahul P. Panat , Deuk H. Heo
CPC classification number: B22F3/1055 , B22F1/0018 , B22F3/008 , B22F2003/1058 , B33Y10/00 , B33Y50/02 , B33Y80/00 , C22C2202/02 , G06F1/163 , H01F17/0006 , H01F17/0033 , H01F27/24 , H01F27/2804 , H01F41/0206 , H01F41/046 , H01G4/002 , H01G4/1218 , H01P11/001 , H05K1/028 , H05K1/0283 , H05K1/0296 , H05K1/0313 , H05K1/0393 , H05K1/09 , H05K1/165 , H05K3/14 , H05K3/22 , H05K3/4644 , H05K2201/0162
Abstract: Three-dimensional inductors may comprise a passivation layer disposed on a substrate, a three-dimensional pillar comprising a ferromagnetic material disposed on the substrate or the passivation layer, and a conductive trace wound at least partially around the pillar. Three-dimensional capacitors may comprise a passivation layer disposed on a substrate, at least two support pillars comprising a polymeric material disposed on the passivation layer or the substrate, at least two electrodes disposed between the support pillars, a dielectric disposed between the electrodes, and a metal trace. Methods of manufacturing the three-dimensional passives, such as inductors and capacitors, may comprise direct writing the components and curing them for on-chip applications.
Abstract translation: 三维电感器可以包括设置在衬底上的钝化层,包括设置在衬底或钝化层上的铁磁材料的三维柱,以及至少部分地围绕柱体缠绕的导电迹线。 三维电容器可以包括设置在衬底上的钝化层,至少两个支撑柱,其包括设置在钝化层或衬底上的聚合材料,设置在支撑柱之间的至少两个电极,设置在电极之间的电介质和 金属痕迹。 制造三维无源元件(例如电感器和电容器)的方法可以包括直接写入元件并固化它们用于片上应用。
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