公开(公告)号：US20230221176A1

公开(公告)日：2023-07-13

申请号：US17845570

申请日：2022-06-21

Applicant: WaveCyber Corporation

Inventor： Daichi SHIRAYAMA ,  Mamoru AMADA ,  Ryuichi MORITA

IPC: G01J1/42

CPC classification number: G01J1/4228 ,  G01J2001/4261

Abstract: Provided is an apparatus for measuring a light beam profile, comprising three rotary disks fixed on three positions of a rotary shaft connected to a motor at regular intervals, respectively while shifted by 120 degrees each other in a rotational direction, each rotary disk having three deformed holes with knife edges and six deformed holes defining light-passing openings and a photodetector arranged outside a set of the three rotary disks in a transmission direction of the light beam to receive the light beam passing through the three rotary disks.