公开(公告)号：US20240035983A1

公开(公告)日：2024-02-01

申请号：US18221043

申请日：2023-07-12

Applicant: WiTrins s.r.o.

Inventor： Pavel Linhart

IPC: G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N21/8851 ,  G01N2021/8845 ,  G01N2201/06153 ,  G01N2201/0631 ,  G01N2021/8874

Abstract: An inspection system and a method for analyzing defects in a product, in particular a printed circuit board product, a semiconductor wafer or the like, the inspection system includes a projection device , an optical detection device , and a processing device, the projection device having an illuminating unit and a spectrometer member configured to split white light into its spectral components and project a multichromatic light beam thus formed from monochromatic light beams onto a product at an angle of incidence β, the optical detection device having a detection unit comprising a camera and an objective , the camera being configured to detect the multichromatic light beam reflected on the product in a detection plane of the detection unit, the detection plane being perpendicular, preferably orthogonal, to a product surface of the product, the illuminating unit having at least two light-emitting diodes disposed in a row and an exit aperture extending along the row.