公开(公告)号：US20140349071A1

公开(公告)日：2014-11-27

申请号：US14455554

申请日：2014-08-08

Applicant: XEROX CORPORATION

Inventor： Yuanjia Zhang ,  Kyoo-Chul Park ,  Hong Zhao ,  Kock-Yee Law

IPC: B41J2/165 ,  B41J2/14

CPC classification number: B41J2/165 ,  B41J2/14 ,  B41J2/1606 ,  B41J2/162 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  G03F7/0035 ,  G03F7/40 ,  Y10T428/24364

Abstract: A device and method for preparing a device having a superoleophobic surface are disclosed. The method includes providing a substrate; coating a lift-off resist layer on the substrate; baking the lift-off resist layer; layering a photoresist layer on the lift-off resist layer; performing photolithography to create a textured pattern in the photoresist layer and the lift-off resist layer, and chemically modifying the textured pattern to create a superoleophobic surface.

Abstract translation: 公开了一种用于制备具有超疏油表面的装置的装置和方法。 该方法包括提供基板; 在基板上涂覆剥离抗蚀剂层; 烘烤剥离抗蚀剂层; 在剥离抗蚀剂层上分层光致抗蚀剂层; 执行光刻以在光致抗蚀剂层和剥离抗蚀剂层中产生纹理图案，以及化学改性纹理图案以产生超疏油表面。