Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads
    1.
    发明授权
    Highly integrated wafer bonded MEMS devices with release-free membrane manufacture for high density print heads 有权
    高度集成的晶片粘合MEMS器件,具有无释放膜制造用于高密度打印头

    公开(公告)号:US08828750B2

    公开(公告)日:2014-09-09

    申请号:US13875262

    申请日:2013-05-01

    Abstract: A method of fabricating a MEMS inkjet type print head and the resulting device is disclosed. The method includes providing a driver component and separately providing an actuatable membrane component, the actuatable membrane component being formed in the absence of an acid etch removing a sacrificial layer. The separately provided actuatable membrane component is bonded to the driver component and a nozzle plate is attached to the actuatable membrane component subsequent to the bonding. Separately fabricating the components removes the need for hydrofluoric acid etch removal of a sacrifical layer previously required for forming the actuatable membrane with respect to the driver component.

    Abstract translation: 公开了制造MEMS喷墨型打印头的方法和所得到的装置。 该方法包括提供驱动器部件并且单独地提供可致动的膜部件,可致动的膜部件在不存在去除牺牲层的酸蚀刻的情况下形成。 单独提供的致动膜部件被结合到驱动器部件,并且在接合之后将喷嘴板附接到可致动膜部件。 单独制造组件不需要氢氟酸蚀刻去除先前为相对于驱动器部件形成可致动膜的牺牲层。

    Nozzle Cleaning in Jetting of Metal Alloys
    2.
    发明申请

    公开(公告)号:US20200324341A1

    公开(公告)日:2020-10-15

    申请号:US16844524

    申请日:2020-04-09

    Abstract: The nozzles of a MHD liquid metal ejector/printhead can be clogged by contaminants in the liquid metal. Typically, these contaminants are in the form of small particles of aggregates of particles, such as metal oxides, that are insoluble in the liquid metal. Possible cleaning methods include mechanically removing the clogging material, such as by using a physical device to dislodge the clogging material and remove it; chemically removing the clogging material, such as by using selected chemicals/flux to chemically react with the clogging material; using ultrasound to break/remove the clogging material; and providing reversed and/or oscillating flow of material through the nozzle.

Patent Agency Ranking