公开(公告)号：US10315224B2

公开(公告)日：2019-06-11

申请号：US15154899

申请日：2016-05-13

Applicant: uBeam Inc.

Inventor： Andrew Joyce ,  Sean Taffler ,  Paul Reynolds ,  Jonathan Lake

IPC: H01L41/053 ,  B06B1/06 ,  G10K9/122 ,  H01L41/09

Abstract: Systems and techniques are provided for an ultrasonic transducer. A substrate may include a main cavity, a secondary cavity, and a channel. The main cavity may have a greater depth than the secondary cavity. The secondary cavity may have a greater depth than channel. A first step may be formed where the main cavity and the secondary cavity overlap. A second step may be formed where the secondary cavity and the main cavity overlap. An electromechanically active device may be attached to the substrate at the first step and the second step such that a free end of the electromechanically active device is suspended over the main cavity. A membrane section may be bonded to the substrate such that the membrane covers the main cavity and the secondary cavity and is bonded to the free end of the electromechanically active.

公开(公告)号：US20190291136A1

公开(公告)日：2019-09-26

申请号：US16436804

申请日：2019-06-10

Applicant: uBeam Inc.

Inventor： Andrew Joyce ,  Sean Taffler ,  Paul Reynolds ,  Jonathan Lake

IPC: B06B1/06 ,  G10K9/122

Abstract: Systems and techniques are provided for an ultrasonic transducer. A substrate may include a main cavity, a secondary cavity, and a channel. The main cavity may have a greater depth than the secondary cavity. The secondary cavity may have a greater depth than channel. A first step may be formed where the main cavity and the secondary cavity overlap. A second step may be formed where the secondary cavity and the main cavity overlap. An electromechanically active device may be attached to the substrate at the first step and the second step such that a free end of the electromechanically active device is suspended over the main cavity. A membrane section may be bonded to the substrate such that the membrane covers the main cavity and the secondary cavity and is bonded to the free end of the electromechanically active.

公开(公告)号：US20160339476A1

公开(公告)日：2016-11-24

申请号：US15154899

申请日：2016-05-13

Applicant: uBeam Inc.

Inventor： Andrew Joyce ,  Sean Taffler ,  Paul Reynolds ,  Jonathan Lake

IPC: B06B1/06 ,  B06B3/00

CPC classification number: B06B1/0666 ,  B06B1/0603 ,  G10K9/122

Abstract: Systems and techniques are provided for an ultrasonic transducer. A substrate may include a main cavity, a secondary cavity, and a channel. The main cavity may have a greater depth than the secondary cavity. The secondary cavity may have a greater depth than channel. A first step may be formed where the main cavity and the secondary cavity overlap. A second step may be formed where the secondary cavity and the main cavity overlap. An electromechanically active device may be attached to the substrate at the first step and the second step such that a free end of the electromechanically active device is suspended over the main cavity. A membrane section may be bonded to the substrate such that the membrane covers the main cavity and the secondary cavity and is bonded to the free end of the electromechanically active.

Abstract translation: 为超声波换能器提供系统和技术。 衬底可以包括主腔，次腔和通道。 主腔可以具有比第二腔更大的深度。 次级腔可以具有比通道更大的深度。 可以在主腔和次腔重叠的地方形成第一步骤。 可以形成第二阶段，其中二次腔和主腔重叠。 机电活动装置可以在第一步骤和第二步骤连接到基板，使得机电活动装置的自由端悬挂在主腔上。 膜部分可以结合到基底，使得膜覆盖主腔和次腔，并且结合到机电活性的自由端。