Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device
    1.
    发明申请
    Optical element and method for its manufacture as well as lightography apparatus and method for manufacturing a semiconductor device 失效
    光学元件及其制造方法以及用于制造半导体器件的照相设备和方法

    公开(公告)号:US20040253426A1

    公开(公告)日:2004-12-16

    申请号:US10491764

    申请日:2004-04-02

    Abstract: In order to reduce contamination of optical elements which comprise a multilayer system on a substrate, it is proposed that the layer material and/or the layer thickness of at least one layer of the multilayer system are/is selected such that the standing wave which forms during reflection of the irradiated operating wavelength, forms a node of the electrical field intensity (node condition) in the area of the free interface of the multilayer system. Furthermore, a method for determining a design of a multilayer system, as well as a manufacturing process and a lithography apparatus are described.

    Abstract translation: 为了减少在基板上包含多层体系的光学元件的污染,提出了选择多层体系的至少一层的层材料和/或层厚度,使得形成的驻波 在照射的工作波长的反射期间,在多层系统的自由界面的区域中形成电场强度(节点条件)的节点。 此外,还描述了一种用于确定多层系统的设计的方法,以及制造工艺和光刻设备。

    Photocatalyst producing method, photocatalyst, and gas purifier
    3.
    发明申请
    Photocatalyst producing method, photocatalyst, and gas purifier 失效
    光催化剂生产方法,光催化剂和气体净化器

    公开(公告)号:US20040213900A1

    公开(公告)日:2004-10-28

    申请号:US10784348

    申请日:2004-02-23

    Abstract: A carrier supporting titania thereon is further caused to carry a metal compound thereon. This metal compound is hydrogen reduced in a heating atmosphere at a first treatment temperature, then oxidized in a heating atmosphere at a second treatment temperature not higher than the first treatment temperature to thereby obtain a photocatalyst. In this event, metal is released from an extremely strong reduction state and thus highly dispersed on the catalyst in the form of fine particles so that high activity of the catalyst can be obtained. Then, by purifying gas while feeding light and heat to the photocatalyst by, for example, blacklights, a volatile organic compound such as acetaldehyde can be decomposed at a high decomposition rate through cooperation between photocatalytic activity and thermal catalytic activity of the photocatalyst.

    Abstract translation: 载体上的二氧化钛载体进一步在其上携带金属化合物。 该金属化合物在第一处理温度下在加热气氛中氢还原,然后在不高于第一处理温度的第二处理温度下在加热气氛中氧化,从而获得光催化剂。 在这种情况下,金属从非常强的还原状态释放,因此以细颗粒的形式高度分散在催化剂上,从而可以获得高活性的催化剂。 然后,通过例如通过黑灯对光催化剂供给光进行净化,并且通过光催化活性和光催化剂的热催化活性之间的协调可以以高分解速率分解挥发性有机化合物如乙醛。

    Fluorescent lamp capable of cleaning air
    4.
    发明申请
    Fluorescent lamp capable of cleaning air 审中-公开
    能够清洁空气的荧光灯

    公开(公告)号:US20040213899A1

    公开(公告)日:2004-10-28

    申请号:US10760524

    申请日:2004-01-21

    Inventor: Wei-Hong Wang

    Abstract: A method of preparing semiconductor nano crystal anatase TiO2 solution uses titanium alkoxide Ti(OR)4 as a main component in combination with chelating agents in aqueous solution. A fluorescent lamp tube is coated with the semiconductor nano crystal anatase TiO2 solution to form a photocatalytic coating fluorescent lamp capable of cleaning air. Then a baking step is carried out at a low temperature about 100-250null C. By doped anatase TiO2 with small amount about 0-1.0 wt % of precious metals complex or transition metals oxides as nano-particle on or in the anatase TiO2 nano-particle surface, the visible light photocatalysis efficiency is increased for air cleaning. By doped with small amount Eunull3 or rare earth metal ion on or in the anatase TiO2 nano-particle surface, which is a photocatalytic material acting as fluorescent agent, the fluorescent lamp has increasing brightness of when it is turned on.

    Abstract translation: 制备半导体纳米晶锐钛矿TiO2溶液的方法使用钛醇钛(OR)4作为主要成分与螯合剂在水溶液中的组合。 荧光灯管涂有半导体纳米晶锐钛矿TiO2溶液,形成能够清洁空气的光催化涂层荧光灯。 然后在约100-250℃的低温下进行烘烤步骤。通过掺杂锐钛矿TiO 2,其中少量约0-1.0重量%的贵金属络合物或过渡金属氧化物作为纳米颗粒在锐钛矿TiO 2纳米颗粒上或其中 - 颗粒表面,空气净化的可见光光催化效率提高。 通过在作为荧光剂的光催化材料的锐钛型TiO 2纳米颗粒表面上或其上掺杂少量的Eu 3+或稀土金属离子,荧光灯在开启时具有增加的亮度。

    Method for fabricating patterns of reflective TFT-LCD using a transcribing mold
    5.
    发明申请
    Method for fabricating patterns of reflective TFT-LCD using a transcribing mold 审中-公开
    使用转录模具制造反射型TFT-LCD的图案的方法

    公开(公告)号:US20040209198A1

    公开(公告)日:2004-10-21

    申请号:US10827798

    申请日:2004-04-19

    CPC classification number: G02F1/133553 G02F1/136227 H01L27/14683

    Abstract: A method for fabricating patterns of a reflective thin film transistor liquid crystal display (TFT-LCD) includes: providing a substrate (300); forming a TFT layer (310) on the substrate; coating a photo resist layer (320) on the TFT layer; pre-baking the photo resist layer; patterning the photo resist layer with a transcribing mold (400) having specific patterns; and further baking the photo resist layer. By using the transcribing mold, the shapes, precision and angles of the patterns can be accurately controlled, thereby easily providing a desired photo resist layer.

    Abstract translation: 一种用于制造反射薄膜晶体管液晶显示器(TFT-LCD)的图案的方法包括:提供基板(300); 在所述基板上形成TFT层(310) 在TFT层上涂覆光刻胶层(320); 预烘烤光刻胶层; 用具有特定图案的转录模具(400)图案化光致抗蚀剂层; 并进一步烘烤光刻胶层。 通过使用转印模具,可以精确地控制图案的形状,精度和角度,从而容易地提供期望的光刻胶层。

    Method and apparatus for manufacturing printed light guide plate
    6.
    发明申请
    Method and apparatus for manufacturing printed light guide plate 失效
    印刷导光板制造装置

    公开(公告)号:US20040185175A1

    公开(公告)日:2004-09-23

    申请号:US10769256

    申请日:2004-01-29

    Inventor: Chang-Chih Sung

    CPC classification number: G02B6/0043 G02B6/0065 G02B6/10

    Abstract: An apparatus for manufacturing a printed light guide plate includes a working platform (23), and a heater (24) coupled to the working platform. A transparent slab (21) is disposed on the working platform. The purpose of coupling the heater to the working platform is to maintain the transparent slab a constant temperature in the range from about 40null C. to about 45null C., such that as few water molecules as possible are absorbed into the transparent slab. The quality of the manufactured printed light guide plate is thus improved.

    Abstract translation: 一种用于制造印刷导光板的装置,包括工作平台(23)和联接到工作平台的加热器(24)。 透明板(21)设置在工作平台上。 将加热器耦合到工作平台的目的是将透明板保持在约40℃至约45℃的恒定温度,使得尽可能少的水分子被吸收到透明板中。 因此,制造的印刷导光板的质量得到改善。

    Method of producing anti-reflection film
    7.
    发明申请
    Method of producing anti-reflection film 失效
    防反射膜的制造方法

    公开(公告)号:US20040180138A1

    公开(公告)日:2004-09-16

    申请号:US10804073

    申请日:2004-03-19

    Abstract: A method of producing an anti-reflection film includes forming a first layer on a transparent substrate, forming a second layer on the first layer, and forming the third layer on the second layer. When an optical admittance Y at a surface of the second layer is represented by, 1 Y = H E = ( x + iy ) where i is the imaginary number unit, thicknesses and reflective indexes of the substrate, first layer, second layer, and third layer are selected so that x and y satisfy the following formula, 0.9xnull(n2nulln02)/2n0null2

    Abstract translation: 防反射膜的制造方法包括在透明基板上形成第一层,在第一层上形成第二层,在第二层上形成第三层。 当第二层表面的光导纳Y表示为, 1 MI> = x + iy MROW> 其中i是虚数单位,衬底的厚度和反射指数,第一层 选择第二层和第三层,使得x和y满足下式:0.9x {(n 2 -n0 2)/ 2n0} 2 <{X-(n 2 + n 0 其中n是第三层的折射率,n0是一个第二层的折射率,n0是一个 抗反射膜外侧的外部区域的折射率。

      Method for forming multilayer thin film and apparatus thereof
      8.
      发明申请
      Method for forming multilayer thin film and apparatus thereof 审中-公开
      多层薄膜的形成方法及其装置

      公开(公告)号:US20040159283A1

      公开(公告)日:2004-08-19

      申请号:US10450607

      申请日:2003-11-26

      CPC classification number: C23C14/547 C23C14/24

      Abstract: The invention relates to a method for forming a multilayer thin film and an apparatus thereof, which are able to form a thin layer at an accuracy of 0.5 nanometers or less on at least a specified layer during formation on a substrate (W) and to increase the yield of multilayer thin film products. X-rays are irradiated from X-ray irradiating means (6) onto the surface of a multilayer thin film during formation on the substrate (W) at angles from 0 to 1.5 degrees, and the obtained reflected X-rays are measured by X-ray measuring means (7) while varying the incident angle null, wherein reflectivity curve depicting the intensities of the reflected X-rays are obtained with respect to the scattering angle 2null, and the reflectivity curve, whose scattering angles exist in a range of 0 to 1 degree, of the reflectivity curve is analyzed. Herein, the thickness of a thin layer during formation is estimated, and a thin layer having a prescribed thickness is formed by controlling the thickness of a layer during formation, utilizing the estimated results.

      Abstract translation: 本发明涉及一种用于形成多层薄膜的方法及其装置,其能够在基板(W)上形成期间至少在特定层上形成0.5纳米或更小的精度的薄层并增加 多层薄膜产品的产量。 X射线从X射线照射装置(6)照射到基板(W)上形成的多层薄膜的表面上,角度为0〜1.5度,所得到的反射X射线用X- 射线测量装置(7),同时改变入射角θ,其中针对散射角2θ获得描绘反射X射线强度的反射率曲线,其反射率曲线的散射角存在于0至 1度,反映曲线进行分析。 这里,估计在形成期间的薄层的厚度,并且利用估计的结果,通过在形成期间控制层的厚度来形成具有规定厚度的薄层。

      UV-reflective interference layer system
      9.
      发明申请
      UV-reflective interference layer system 有权
      UV反射干涉层系统

      公开(公告)号:US20040156984A1

      公开(公告)日:2004-08-12

      申请号:US10775010

      申请日:2004-02-09

      CPC classification number: G02B5/283 C03C17/3417

      Abstract: There is provided a UV-reflective interference layer system for transparent substrates with broadband anti-reflection properties in the visible wavelength range. The interference layer system includes at least four individual layers. Successive layers have different refractive indices and the individual layers contain UV and temperature-stable inorganic materials.

      Abstract translation: 在可见光波长范围内提供具有宽带抗反射特性的透明基板的UV反射干涉层系统。 干涉层系统包括至少四个单独的层。 连续层具有不同的折射率,各层含有UV和温度稳定的无机材料。

      Durable nano-structured optical surface
      10.
      发明申请
      Durable nano-structured optical surface 失效
      耐用的纳米结构光学表面

      公开(公告)号:US20040137221A1

      公开(公告)日:2004-07-15

      申请号:US10746070

      申请日:2003-12-24

      CPC classification number: G02B1/14 G02B1/105 G02B1/111 G02B1/118 Y10T428/261

      Abstract: The durability and abrasion resistance of nano-structured optical surfaces, particularly those formed of or on polymeric substrate, are enhanced by at least one of adhering to it a fluorinated carbon molecule or other reactive lube composition as a monolayer coating (or a thin and substantially uniform multi-layer coating) and by treatment with a surface-active cross-linking agent.

      Abstract translation: 纳米结构光学表面的耐久性和耐磨性,特别是由聚合物基材形成的或在聚合物基材上形成的耐久性和耐磨性通过将氟化碳分子或其它反应性润滑组合物粘附到单层涂层(或薄而基本上 均匀的多层涂层)和通过用表面活性交联剂处理。

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