公开(公告)号：US5584117A

公开(公告)日：1996-12-17

申请号：US570061

申请日：1995-12-11

Applicant: Shih-ping Lee ,  Chi-Nan Chen

Inventor： Shih-ping Lee ,  Chi-Nan Chen

IPC: G01J3/26 ,  G01J5/20 ,  G02B26/00 ,  H01L31/09 ,  H01C17/06 ,  H01J4/00

CPC classification number: H01L31/09 ,  G01J3/26 ,  G01J5/20 ,  G02B26/001 ,  Y10T29/49002 ,  Y10T29/49099

Abstract: An infrared detector device is described. It is based on an infrared analog of the Fabry Perot interferometer, using one curved, fully reflecting, plate and one planar, mainly reflecting, but partially transmitting, plate. The space between these plates behaves as a resonant cavity which can be built to respond to either a broad or a narrow band of wavelengths in the general range between 1 and 15 microns. It is also possible to combine several detectors of different narrow bands in a single device. Actual detection of the radiation is based on use of thin film resistors, having a high thermal coefficient of resistance, that are thermally isolated from the other parts of the structure. Details relating to the manufacture of the devices are given.

Abstract translation: 描述了红外检测器装置。 它基于法布里·珀罗干涉仪的红外模拟，使用一个弯曲的，完全反射的板和一个平面的，主要是反射的，但部分透射的板。 这些板之间的空间表现为谐振腔，该谐振腔可被构造成响应在1至15微米之间的一般范围内的宽波段或窄波段。 还可以在单​​个设备中组合不同窄带的几个检测器。 辐射的实际检测是基于使用薄膜电阻器，其具有与结构的其它部分热隔离的高的电阻热系数。 给出了关于装置制造的细节。