公开(公告)号：US07977630B2

公开(公告)日：2011-07-12

申请号：US11102483

申请日：2005-04-08

Applicant: Toshikatsu Kaneyama

Inventor： Toshikatsu Kaneyama

IPC: H01J44/00

CPC classification number: H01J37/26 ,  H01J2237/05 ,  H01J2237/2522

Abstract: There is disclosed an electron microscope that achieves low-magnification imaging while the objective lens is kept at high excitation in the same way as during high-magnification imaging. An objective minilens located immediately behind the objective lens demagnifies a specimen image magnified by the objective lens. Consequently, a sharply focused electron beam enters the first intermediate lens. This greatly reduces the effects of off-axis aberrations in the intermediate lenses. The first, second, and third intermediate lenses create a crossover image and a microscope image in the entrance window plane and entrance image plane, respectively, of an energy filter. The energy filter focuses the microscope image and crossover image onto the exit image plane and exit window plane, respectively. The output image from the filter is projected onto the final image plane by first and second projector lenses.

Abstract translation: 公开了以与高倍率成像时相同的方式在物镜保持高激发的同时实现低倍率成像的电子显微镜。 位于物镜后面的物镜微缩镜使由物镜放大的样本图像缩小。 因此，尖锐聚焦的电子束进入第一中间透镜。 这大大降低了中间透镜中离轴像差的影响。 第一，第二和第三中间透镜分别在能量过滤器的入射窗平面和入射图像平面中产生交叉图像和显微镜图像。 能量过滤器将显微镜图像和交叉图像分别聚焦到出射图像平面和出射窗口平面。 来自滤波器的输出图像由第一和第二投影仪透镜投射到最终的图像平面上。