Invention Patent
- Patent Title: BONDING TOOL
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Application No.: CA2023933Application Date: 1990-08-24
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Publication No.: CA2023933CPublication Date: 1993-11-09
- Inventor: NAKAMURA TSUTOMU , TANAKA KATSUYUKI , NAKAI TETSUO , IMAI TAKAHIRO , IKEGAYA AKIHIKO , FUJIMORI NAOJI
- Applicant: SUMITOMO ELECTRIC INDUSTRIES
- Assignee: SUMITOMO ELECTRIC INDUSTRIES
- Current Assignee: SUMITOMO ELECTRIC INDUSTRIES
- Priority: JP33232889 1989-12-20; JP12992490 1990-05-18
- Main IPC: C04B41/50
- IPC: C04B41/50 ; C04B41/85 ; H01L21/447 ; C23C16/26 ; H01L21/603
Abstract:
TITLE OF THE INVENTION A bonding tool A bonding tool for TAB, used in the production of semiconductor chips, which is provided with, at the end thereof, a substrate consisting of a member selected from the group consisting of sintered compacts of Si or Si3N4 as a predominant component, sintered compacts of SiC as a predominant component, sintered compacts of AlN as a predominant component and composite compacts thereof, the substrate being coated with polycrystalline diamond deposited by gaseous phase synthesis method.
Public/Granted literature
- CA2023933A1 BONDING TOOL Public/Granted day:1991-06-21
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