The invention discloses a deposition apparatus and method capable of obviously reducing maintenace and maintenace time of mass production of substantially-same organic light emitting display apparatuses. The deposition apparatus includes a first transporting unit configured to transport moving units, to which substrates may be detachably affixed, in a first direction; and a second transporting unit configured to transport empty moving units, from which the respective substrates have been detached, in a return direction opposite to the first direction; a loading unit configured to fix the substrates to respective ones of the moving units; a deposition unit, which includes one or more deposition assemblies, which are kept a predetermined distance apart from the substrates and are configured to deposit corresponding material layers onto the substrates while the first transporting unit is transporting the substrates past the deposition assemblies; a chamber; an unloading unit configured to detach the substrates from their respective moving units after deposition onto the respective substrates is completed; and a first moving unit stocker, in which a backup moving unit may be accommodated.