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Invention Publication
CN106463446A 载置台及等离子体处理装置 有权

载置台及等离子体处理装置
Abstract:
本发明提供一种载置台及等离子体处理装置。本发明的一实施方式的载置台具备支承部件及基座。支承部件具有：载置区域，具有加热器；及外周区域，围绕载置区域。基座具有：第1区域，在其上支承载置区域；及第2区域，围绕第1区域。第2区域中设有贯穿孔。电连接于加热器的配线穿过第2区域的贯穿孔。
Abstract(English):

According to one embodiment of the present invention, a placing table is provided with a supporting member and a base. The supporting member has a placing region having a heater, and an outer peripheral region that surrounds the placing region. The base has a first region for supporting the placing region thereon, and a second region that surrounds the first region. The second region is provided with a through hole. Wiring electrically connected to the heater is inserted into the through hole in the second region.

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