Invention Publication
- Patent Title: NANOSHEET STRUCTURES WITH TUNABLE CHANNELS AND INNER SIDEWALL SPACERS
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Application No.: EP24153816.4Application Date: 2024-01-25
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Publication No.: EP4465362A1Publication Date: 2024-11-20
- Inventor: YU, Hong , PRITCHARD, David C. , JAIN, Navneet K. , MAZZA, James P. , FEUILLETTE, Romain H. A.
- Applicant: GlobalFoundries U.S. Inc.
- Applicant Address: US Malta, NY 12020 400 Stonebreak Road Extension
- Agency: Lambacher, Michael
- Priority: US202318199054 20230518
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/10 ; H01L29/66 ; H01L29/775 ; H01L29/786
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to nanosheet transistor structures with tunable channels and inner sidewall spacers and methods of manufacture. The structure includes: a plurality of stacked semiconductor nanosheets over a semiconductor substrate; a plurality of gate structures surrounding individual nanosheets of the plurality of semiconductor nanosheets, with a lower gate structure comprising a length at least equal to a length of each remaining gate structure of the plurality of gate structures; an inner sidewall spacer adjacent each of the plurality of gate structures; and source/drain regions on opposing sides of the plurality of gate structures, separated therefrom by the inner sidewall spacer.
Information query
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