Invention Patent
- Patent Title: OTTURATORE OTTICO MICROELETTROMECCANICO CON STRUTTURE SCHERMANTI TRASLANTI E RELATIVO PROCEDIMENTO DI FABBRICAZIONE
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Application No.: IT202100030275Application Date: 2021-11-30
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Publication No.: IT202100030275A1Publication Date: 2023-05-30
- Inventor: VERCESI FEDERICO , BONI NICOLO' , CERINI FABRIZIO , GUERINONI LUCA
- Applicant: ST MICROELECTRONICS SRL
- Assignee: ST MICROELECTRONICS SRL
- Current Assignee: ST MICROELECTRONICS SRL
- Priority: IT202100030275 2021-11-30
- Main IPC: H01L
- IPC: H01L20060101
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