Invention Patent
- Patent Title:
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Application No.: ITTO20001100Application Date: 2000-11-24
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Publication No.: ITTO20001100D0Publication Date: 2000-11-24
- Inventor: PATTI DAVIDE
- Applicant: ST MICROELECTRONICS SRL
- Assignee: ST MICROELECTRONICS SRL
- Current Assignee: ST MICROELECTRONICS SRL
- Priority: ITTO20001100 2000-11-24
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L27/08 ; H01L29/8605
Abstract:
A structure for a semiconductor resistive element, applicable in particular to power components, having a high concentration substrate of the n type, a first epitaxial layer of the n type, a region of the p type arranged on said first epitaxial layer so to form the resistive element proper, a second epitaxial layer of n type grown on said first epitaxial layer to make the region of the p type a buried region, and an additional layer of the n type with a higher concentration with respect to the second epitaxial level, positioned on the embedded region. Low resistivity regions of the p type adapted to make low resistivity deep contacts for the resistor are provided. The buried region can be made either with a development that is substantially uniform in its main direction of extension or so to present, at on part of its length, a structure of adjacent subregions in marginal continuity. In this way, either a resistive element presenting a substantially linear performance in all ranges of applied voltage or a resistive element presenting a marked increase of the resistance value as the applied voltage increases can be made. This all with the additional possibility of selectively varying the resistance value demonstrated before the increase.
Public/Granted literature
- IT1321089B1 Public/Granted day:2003-12-30
Information query
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