Invention Patent
- Patent Title:
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Application No.: ITTO20010699Application Date: 2001-07-17
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Publication No.: ITTO20010699D0Publication Date: 2001-07-17
- Inventor: BASCHIROTTO ANDREA , LASALANDRA ERNESTO , UNGARETTI TOMMASO
- Applicant: ST MICROELECTRONICS SRL , HEWLETT PACKARD CO
- Assignee: ST MICROELECTRONICS SRL,HEWLETT PACKARD CO
- Current Assignee: ST MICROELECTRONICS SRL,HEWLETT PACKARD CO
- Priority: ITTO20010699 2001-07-17
- Main IPC: G01P21/00
- IPC: G01P21/00 ; G01P15/125 ; G01P15/13
Abstract:
A method for detecting displacements of a micro-electromechanical sensor (101) including a fixed body (3) and a mobile mass (4), forming at least a first sensing capacitor (107) and a second sensing capacitor (108), which are connected to a first input terminal (102) and, respectively, to a first output terminal (104) and to a second output terminal (105) of the sensing circuit and have a rest common sensing capacitance (Cs). The method includes the steps of: closing a first negative-feedback loop (136), which comprises the first sensing capacitor (107) and the second sensing capacitor (108) and a differential amplifier (124); supplying to at least one input (124b) of the differential amplifier (124) a staircase sensing voltage (Vs) through driving capacitors (121, 122) so as to produce variations ( DELTA Vc) of an electrical driving quantity (Vc) which are inversely proportional to the common sensing capacitance (Cs); and driving the sensor (101) with the electrical driving quantity (Vc) .
Public/Granted literature
- ITTO20010699A1 Public/Granted day:2003-01-17
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