METHOD AND CIRCUIT FOR DETECTING DISPLACEMENT USING MICRO-ELECTROMECHANICAL SENSOR WITH COMPENSATION OF PARASITIC CAPACITANCE AND SPURIOUS DISPLACEMENT

    公开(公告)号:JP2003177142A

    公开(公告)日:2003-06-27

    申请号:JP2002208618

    申请日:2002-07-17

    Abstract: PROBLEM TO BE SOLVED: To provide a micro-electromechanical sensor accompanied with compensation of parasitic capacitances and spurious displacements. SOLUTION: In this sensor, a fixed body 3 and a movable mass 4 are connected to a first input terminal 102 of a detection circuit, and one or more first detection capacitors 107 and second detection capacitors 108 connected respectively to a first output terminal 104 and a second output terminal 105 are formed, and a rest common detection capacity Cs is provided. The sensor has a step for closing a first negative feedback loop 136 equipped with the first detection capacitors 107, the second detection capacitors 108 and a differentiating amplifier 124, a step for supplying one or more inputs 124b of the differentiating amplifier 124 with a step detection voltage Vs through driving capacitors 121, 122 in order to generate a variation ΔVc of the electric driving quantity Vc in reverse proportion to the common detection capacity Cs, and a step for driving the sensor 101 by the electric driving quantity Vc. COPYRIGHT: (C)2003,JPO

    2.
    发明专利
    未知

    公开(公告)号:DE60236055D1

    公开(公告)日:2010-06-02

    申请号:DE60236055

    申请日:2002-07-16

    Abstract: A method for detecting displacements of a micro-electromechanical sensor (101) including a fixed body (3) and a mobile mass (4), forming at least a first sensing capacitor (107) and a second sensing capacitor (108), which are connected to a first input terminal (102) and, respectively, to a first output terminal (104) and to a second output terminal (105) of the sensing circuit and have a rest common sensing capacitance (Cs). The method includes the steps of: closing a first negative-feedback loop (136), which comprises the first sensing capacitor (107) and the second sensing capacitor (108) and a differential amplifier (124); supplying to at least one input (124b) of the differential amplifier (124) a staircase sensing voltage (Vs) through driving capacitors (121, 122) so as to produce variations ( DELTA Vc) of an electrical driving quantity (Vc) which are inversely proportional to the common sensing capacitance (Cs); and driving the sensor (101) with the electrical driving quantity (Vc) .

    3.
    发明专利
    未知

    公开(公告)号:ITTO20010699A1

    公开(公告)日:2003-01-17

    申请号:ITTO20010699

    申请日:2001-07-17

    Abstract: A method for detecting displacements of a micro-electromechanical sensor (101) including a fixed body (3) and a mobile mass (4), forming at least a first sensing capacitor (107) and a second sensing capacitor (108), which are connected to a first input terminal (102) and, respectively, to a first output terminal (104) and to a second output terminal (105) of the sensing circuit and have a rest common sensing capacitance (Cs). The method includes the steps of: closing a first negative-feedback loop (136), which comprises the first sensing capacitor (107) and the second sensing capacitor (108) and a differential amplifier (124); supplying to at least one input (124b) of the differential amplifier (124) a staircase sensing voltage (Vs) through driving capacitors (121, 122) so as to produce variations ( DELTA Vc) of an electrical driving quantity (Vc) which are inversely proportional to the common sensing capacitance (Cs); and driving the sensor (101) with the electrical driving quantity (Vc) .

    4.
    发明专利
    未知

    公开(公告)号:ITTO20010699D0

    公开(公告)日:2001-07-17

    申请号:ITTO20010699

    申请日:2001-07-17

    Abstract: A method for detecting displacements of a micro-electromechanical sensor (101) including a fixed body (3) and a mobile mass (4), forming at least a first sensing capacitor (107) and a second sensing capacitor (108), which are connected to a first input terminal (102) and, respectively, to a first output terminal (104) and to a second output terminal (105) of the sensing circuit and have a rest common sensing capacitance (Cs). The method includes the steps of: closing a first negative-feedback loop (136), which comprises the first sensing capacitor (107) and the second sensing capacitor (108) and a differential amplifier (124); supplying to at least one input (124b) of the differential amplifier (124) a staircase sensing voltage (Vs) through driving capacitors (121, 122) so as to produce variations ( DELTA Vc) of an electrical driving quantity (Vc) which are inversely proportional to the common sensing capacitance (Cs); and driving the sensor (101) with the electrical driving quantity (Vc) .

    METHOD FOR CANCELING COMMON MODE CURRENT SIGNAL AND TRANSCONDUCTOR SYSTEM USING SUCH METHOP

    公开(公告)号:JPH0846456A

    公开(公告)日:1996-02-16

    申请号:JP16656895

    申请日:1995-06-30

    Abstract: PURPOSE: To highly reduce common mode current signals in an output terminal. CONSTITUTION: The method for canceling common mode current signals at the second transconductor circuit C2 output terminals OP1 and OM1, which are provided with the same differential mode transconductance value as the second common mode conductance value is provided with a first transconductor circuit C1, and a second transconductor circuit C2. The circuit C1 is provided with the same differential mode transconductance value as the first common mode transconductance value. The circuit C2 is provided with the common mode transconductance whose coefficient is almost the same as the second value and whose code is opposite in parallel to the first transconductor circuit C1.

    LOW VOLTAGE SWITCHING CAPACITANCE CIRCUIT USING SWITCHING OPERATIONAL AMPLIFIER WITH MAXIMUM VOLTAGE SWING

    公开(公告)号:JPH08130422A

    公开(公告)日:1996-05-21

    申请号:JP18343495

    申请日:1995-06-26

    Abstract: PURPOSE: To eliminate the loss of a charge and to hold a dynamic characteristic by stitching the output of the input switched operational amplifier structure of a switched capacitance circuit to supply voltage. CONSTITUTION: The output of the input switched operational amplifier structure of the switched capacitance circuit is switched to supply voltage Vdd instead of making it to a ground value. It is realized by using a private integrated P-channel switch in a substrate connected to supply voltage Vdd and what is called body effect is removed. Thus, the output node of the input operational amplifier A1 does not take negative voltage during an operation when the switched operational amplifier is turned off. For subtracting Vdd/2 voltage instead of adding them, a clock phase for driving two switches S2 and S3 connecting a bias capacitor Cdc to the supply node and ground is exchanged. Thus, the arbitrary loss through respective substrates can be prevented.

    TRANSCONDUCTOR CIRCUIT AND ACTIVE FILTER

    公开(公告)号:JPH0846457A

    公开(公告)日:1996-02-16

    申请号:JP16656995

    申请日:1995-06-30

    Abstract: PURPOSE: To suppress distortion generated by a transconductance by suppressing fluctuation of a load current and voltage. CONSTITUTION: The transconductor circuit consists of two input transistors M1 and M2 that are provided with a differential input and single output and the primary induction terminals D1, S1, D2 and S2 connected to one another so as to reduce the fluctuation of load current and voltage and at the same time to suppress the distortion generated by each of the transconductances as well.

    Fully differential, switched capacitor, operational amplifier circuit with common-mode controlled output

    公开(公告)号:US6411166B2

    公开(公告)日:2002-06-25

    申请号:US86491601

    申请日:2001-05-23

    CPC classification number: H03F3/4565 H03F3/005 H03F3/45183

    Abstract: A switched operational amplifier with fully differential topology, alternately switchable on and off, and a control circuit. The operational amplifier has a first differential output (4a) and a second differential output, and a control terminal. The control circuit includes a capacitive detecting network including a first capacitor and a second capacitor connected between the first and second differential outputs and a common-mode node, and a third capacitor connected between the common-mode node and ground in a first operative condition, and between the common-mode node and the supply voltage in a second operative condition. A control transistor is connected between the common-mode node and the control terminal of the operational amplifier and supplies a control current correlated to the voltage on the common-mode node. A switchable voltage source, connected to the common-mode node, supplies a desired voltage in a first operative condition, when the operational amplifier is off.

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