EWS PROBE CARD OF TEST-ON-WAFER STATION AND UNIVERSAL CONNECTION STRUCTURE BETWEEN TEST CARDS
Abstract:
PURPOSE: To quickly and easily connect both an EWS probe card and a test card by forming male contacts on the upper face of the EWS probe card and the lower face of the test card, and electrically connecting them with double female contacts of universal connectors. CONSTITUTION: This system is provided with plural male contacts 6 set on the upper face of an EWS probe card 3, and individually connected with each probe 5 projecting from the bottom face of the probe card 3, and plural contacts 6 arranged on the bottom face of a test card 10. Also, this system is provided with universal connectors 7, on which plural double female contacts are mounted which are formed with sufficient room in each receptacle formed in insulating materials. Also, the mutual coupling of each male contact 6 can be attained through the double female contacts of the universal connectors 7. Thus, the EWS probe card 3 can be quickly and easily connected with the test card 10.
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