EWS PROBE CARD OF TEST-ON-WAFER STATION AND UNIVERSAL CONNECTION STRUCTURE BETWEEN TEST CARDS

    公开(公告)号:JPH0621167A

    公开(公告)日:1994-01-28

    申请号:JP17435491

    申请日:1991-06-19

    Abstract: PURPOSE: To quickly and easily connect both an EWS probe card and a test card by forming male contacts on the upper face of the EWS probe card and the lower face of the test card, and electrically connecting them with double female contacts of universal connectors. CONSTITUTION: This system is provided with plural male contacts 6 set on the upper face of an EWS probe card 3, and individually connected with each probe 5 projecting from the bottom face of the probe card 3, and plural contacts 6 arranged on the bottom face of a test card 10. Also, this system is provided with universal connectors 7, on which plural double female contacts are mounted which are formed with sufficient room in each receptacle formed in insulating materials. Also, the mutual coupling of each male contact 6 can be attained through the double female contacts of the universal connectors 7. Thus, the EWS probe card 3 can be quickly and easily connected with the test card 10.

    2.
    发明专利
    未知

    公开(公告)号:DE69131266D1

    公开(公告)日:1999-07-01

    申请号:DE69131266

    申请日:1991-06-12

    Abstract: An universal connector employing a plurality of double female contacts installed with a certain clearance in receptacles of a body which may be suspended in a coupling position with a plurality of male contacts arranged on the top face of an EWS probe card and with a plurality of male contacts arranged on the bottom surface of a test card in a test-on-wafer station, provides a multicontact universal connection for any pair of so equipped cards of the inventories of probe cards and of test cards of the station. The connection is easily to set up and exibits excellent stability and uniformity characteristics of the electrical couplings, while reducing sensibly the time necessary for the setting-up and debugging of the test station for initiating a certain cycle of testing-on-wafer. The stability and reproducibility of the electrical couplings provided by the connection increases the precision of the measurements of critical parameters of the integrated devices with a positive effect on the production yield.

    3.
    发明专利
    未知

    公开(公告)号:DE69131266T2

    公开(公告)日:1999-09-23

    申请号:DE69131266

    申请日:1991-06-12

    Abstract: An universal connector employing a plurality of double female contacts installed with a certain clearance in receptacles of a body which may be suspended in a coupling position with a plurality of male contacts arranged on the top face of an EWS probe card and with a plurality of male contacts arranged on the bottom surface of a test card in a test-on-wafer station, provides a multicontact universal connection for any pair of so equipped cards of the inventories of probe cards and of test cards of the station. The connection is easily to set up and exibits excellent stability and uniformity characteristics of the electrical couplings, while reducing sensibly the time necessary for the setting-up and debugging of the test station for initiating a certain cycle of testing-on-wafer. The stability and reproducibility of the electrical couplings provided by the connection increases the precision of the measurements of critical parameters of the integrated devices with a positive effect on the production yield.

    4.
    发明专利
    未知

    公开(公告)号:IT1243302B

    公开(公告)日:1994-05-26

    申请号:IT8362390

    申请日:1990-06-19

    Abstract: An universal connector employing a plurality of double female contacts installed with a certain clearance in receptacles of a body which may be suspended in a coupling position with a plurality of male contacts arranged on the top face of an EWS probe card and with a plurality of male contacts arranged on the bottom surface of a test card in a test-on-wafer station, provides a multicontact universal connection for any pair of so equipped cards of the inventories of probe cards and of test cards of the station. The connection is easily to set up and exibits excellent stability and uniformity characteristics of the electrical couplings, while reducing sensibly the time necessary for the setting-up and debugging of the test station for initiating a certain cycle of testing-on-wafer. The stability and reproducibility of the electrical couplings provided by the connection increases the precision of the measurements of critical parameters of the integrated devices with a positive effect on the production yield.

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