Invention Grant
- Patent Title: High voltage shielding and cooling in a charged particle beam generator
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Application No.: US15594712Application Date: 2017-05-15
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Publication No.: US10037864B2Publication Date: 2018-07-31
- Inventor: Alexander Hendrik Vincent Van Veen , Willem Henk Urbanus
- Applicant: MAPPER LITHOGRAPHY IP B.V.
- Applicant Address: NL Delft
- Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee: MAPPER LITHOGRAPHY IP B.V.
- Current Assignee Address: NL Delft
- Agency: Hoyng Rock Monegier LLP
- Agent David P. Owen
- Main IPC: G03B27/52
- IPC: G03B27/52 ; H01J37/09 ; H01J37/30 ; H01J37/317 ; B82Y10/00 ; B82Y40/00 ; H01J37/147 ; H01J37/302
Abstract:
The invention relates to a charged particle beam generator. The generator may comprise a high voltage shielding arrangement (201) for shielding components outside the shielding arrangement from high voltages within the shielding arrangement, and a vacuum pump (220) located outside the shielding arrangement for regulating a pressure of a space within the shielding arrangement. The generator may comprise a collimator system with a cooling arrangement (405a/407a-407b/405b) comprising cooling channels inside electrodes of the collimator system.
Public/Granted literature
- US20170250053A1 High voltage shielding and cooling in a charged particle beam generator Public/Granted day:2017-08-31
Information query
