Invention Grant
- Patent Title: Vacuum drying apparatus and method of manufacturing film using the same
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Application No.: US15236805Application Date: 2016-08-15
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Publication No.: US10052657B2Publication Date: 2018-08-21
- Inventor: Katsushi Kishimoto
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si, Gyeonggi-do
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-do
- Agency: Lee & Morse P.C.
- Priority: KR10-2016-0051344 20160427
- Main IPC: B05D1/02
- IPC: B05D1/02 ; H01L51/56 ; B05D1/00 ; H01L51/00 ; B05D3/04
Abstract:
A method of manufacturing a film includes disposing a substrate under one side of a baffle plate in a film manufacturing space, the baffle plate having a plurality of through-holes, and spraying an inert gas toward the substrate through a plurality of nozzle tips branched from a gas distribution pipe that is disposed over an other side of the baffle plate such that the inert gas penetrates the baffle plate through the through-holes.
Public/Granted literature
- US20170317318A1 VACUUM DRYING APPARATUS AND METHOD OF MANUFACTURING FILM USING THE SAME Public/Granted day:2017-11-02
Information query
