Invention Grant
- Patent Title: Spectrometer
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Application No.: US14874378Application Date: 2015-10-02
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Publication No.: US10072984B2Publication Date: 2018-09-11
- Inventor: Keith T. Carron , Shane A. Buller , Mark A. Watson , Sean Patrick Woodward
- Applicant: MKS TECHNOLOGY
- Applicant Address: US WY Centennial
- Assignee: MKS Technology, Inc.
- Current Assignee: MKS Technology, Inc.
- Current Assignee Address: US WY Centennial
- Agency: Dinsmore & Shohl LLP
- Agent Thomas J. Osborne, Jr.
- Main IPC: G01J3/44
- IPC: G01J3/44 ; G01N21/65 ; G01J3/02 ; G01J3/10 ; G01N21/47

Abstract:
Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.
Public/Granted literature
- US20160223400A1 SPECTROMETER Public/Granted day:2016-08-04
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