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公开(公告)号:US11092494B1
公开(公告)日:2021-08-17
申请号:US16430402
申请日:2019-06-03
Applicant: MKS TECHNOLOGY
Inventor: Keith T. Carron , Shane A. Buller , Mark A. Watson , Sean Patrick Woodward
Abstract: A spectrometer, such as a Raman spectrometer, adapted for analyzing a complex sample is provided. In an example implementation, the spectrometer may be able to determine one or more spectral characteristics of an inner subsurface layer or region of a complex sample (e.g., contents of a container). In one embodiment, for example, A spectrometer includes an excitation source configured to provide an excitation signal; an optical system configured to direct the excitation signal toward a sample and receive a spectroscopy signal from the sample. The optical system may include a spatial filter configured to separate or isolate at least one first portion of the spectroscopy signal from at least one second portion of the spectroscopy signal and pass the at least one first portion of the spectroscopy signal. A detector is configured to determine at least one spectral feature of the at least one first portion of the spectroscopy signal.
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公开(公告)号:US12247880B1
公开(公告)日:2025-03-11
申请号:US17403473
申请日:2021-08-16
Applicant: MKS TECHNOLOGY
Inventor: Keith T. Carron , Shane A. Buller , Mark A. Watson , Sean Patrick Woodward
Abstract: A spectrometer, such as a Raman spectrometer, adapted for analyzing a complex sample is provided. In an example implementation, the spectrometer may be able to determine one or more spectral characteristics of an inner subsurface layer or region of a complex sample (e.g., contents of a container). In one embodiment, for example, A spectrometer includes an excitation source configured to provide an excitation signal; an optical system configured to direct the excitation signal toward a sample and receive a spectroscopy signal from the sample. The optical system may include a spatial filter configured to separate or isolate at least one first portion of the spectroscopy signal from at least one second portion of the spectroscopy signal and pass the at least one first portion of the spectroscopy signal. A detector is configured to determine at least one spectral feature of the at least one first portion of the spectroscopy signal.
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公开(公告)号:US20190242751A1
公开(公告)日:2019-08-08
申请号:US16126998
申请日:2018-09-10
Inventor: Keith T. Carron , Shane A. Buller , Mark A. Watson , Sean Patrick Woodward
CPC classification number: G01J3/4412 , G01J3/0208 , G01J3/021 , G01J3/027 , G01J3/0297 , G01J3/10 , G01J3/44 , G01N21/65 , G01N2021/4711 , G01N2201/0612 , G01N2201/068 , G01N2201/12
Abstract: Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.
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公开(公告)号:US10072984B2
公开(公告)日:2018-09-11
申请号:US14874378
申请日:2015-10-02
Applicant: MKS TECHNOLOGY
Inventor: Keith T. Carron , Shane A. Buller , Mark A. Watson , Sean Patrick Woodward
CPC classification number: G01J3/4412 , G01J3/0208 , G01J3/021 , G01J3/027 , G01J3/0297 , G01J3/10 , G01J3/44 , G01N21/65 , G01N2021/4711 , G01N2201/0612 , G01N2201/068 , G01N2201/12
Abstract: Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.
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公开(公告)号:US20160223400A1
公开(公告)日:2016-08-04
申请号:US14874378
申请日:2015-10-02
Inventor: Keith T. Carron , Shane A. Buller , Mark A. Watson , Sean Patrick Woodward
CPC classification number: G01J3/4412 , G01J3/0208 , G01J3/021 , G01J3/027 , G01J3/0297 , G01J3/10 , G01J3/44 , G01N21/65 , G01N2021/4711 , G01N2201/0612 , G01N2201/068 , G01N2201/12
Abstract: Spectrometers and methods for determining the presence or absence of a material in proximity to and/or combined with another material are provided. In one particular example, a spectrometer is provided that includes a light source, a detector and an optical system. In this implementation, the light source is configured to provide an excitation incident beam. The detector is configured to detect a spectroscopy signal. The optical system is configured to direct the excitation incident beam toward a sample at a non-zero angle from a zero-angle reference. The optical system is further configured to receive a spectroscopy signal from the sample and provide the spectroscopy signal to the detector. The detector is configured to remove a spectral interference component of the spectroscopy signal.
Abstract translation: 提供了用于确定材料是否存在或与其他材料接近和/或组合的光谱仪和方法。 在一个具体示例中,提供了包括光源,检测器和光学系统的光谱仪。 在该实现中,光源被配置为提供激励入射光束。 检测器被配置为检测光谱信号。 光学系统被配置为将激发入射光束从零角参考以非零角度引向样本。 光学系统还被配置为从样品接收光谱信号,并向检测器提供光谱信号。 检测器被配置为去除光谱信号的光谱干涉分量。
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公开(公告)号:US10458917B2
公开(公告)日:2019-10-29
申请号:US15864340
申请日:2018-01-08
Applicant: MKS Technology, Inc.
Inventor: Keith T. Carron , Celestin P. Zemtsop , Shane A. Buller , Scott L. Rudder , Harald R. Guenther
IPC: G01N21/65
Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.
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公开(公告)号:US20180195965A1
公开(公告)日:2018-07-12
申请号:US15864340
申请日:2018-01-08
Applicant: MKS Technology, Inc.
Inventor: Keith T. Carron , Celestin P. Zemtsop , Shane A. Buller , Scott L. Rudder , Harald R. Guenther
IPC: G01N21/65
CPC classification number: G01N21/65 , G01N2201/06113 , G01N2201/0683
Abstract: A method of measuring Raman scattering includes exciting Raman scattering of a sample with a first wavelength and a second wavelength of electromagnetic radiation traveling along a common optical path to form a first scattered radiation and a second scattered radiation. The first wavelength reaches the sample polarized in a first direction, and the second wavelength reaches the sample polarized in a second direction perpendicular to the first direction. The method includes collecting a first Raman spectrum from the first scattered radiation, collecting a second Raman spectrum from the second scattered radiation, and forming a decomposed Raman spectrum based on the first Raman spectrum and the second Raman spectrum. The decomposed Raman spectrum may be substantially free of noise, such as fluorescence and background radiation. Related spectrometers and laser devices are disclosed.
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