Invention Grant
- Patent Title: Defect image classification apparatus
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Application No.: US15163725Application Date: 2016-05-25
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Publication No.: US10074511B2Publication Date: 2018-09-11
- Inventor: Takehiro Hirai , Yohei Minekawa , Yutaka Tandai
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2015-114689 20150605
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/22 ; H01J37/285 ; H01J37/28

Abstract:
A defect image classification apparatus includes a control unit that selects images obtained from at least some detectors among a plurality of detectors, associated with kinds of defects to be a classification result of an automatic defect classification processing unit, as images displayed initially on a display unit. The control unit associates the kinds of the defects and the images displayed initially on the display unit, on the basis of a switching operation log when a user classifies images of defects determined previously as the same kinds as the kinds of the defects determined by the automatic defect classification processing unit.
Public/Granted literature
- US20160358746A1 Defect Image Classification Apparatus Public/Granted day:2016-12-08
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