Invention Grant
- Patent Title: Data processing in a tomographic imaging apparatus
-
Application No.: US15215341Application Date: 2016-07-20
-
Publication No.: US10078057B2Publication Date: 2018-09-18
- Inventor: Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, P.C.
- Agent Michael O. Scheinberg
- Priority: EP15183475 20150902
- Main IPC: G06K9/00
- IPC: G06K9/00 ; G01N23/046 ; H01J37/26 ; G06T11/00

Abstract:
A method of investigating a specimen using a tomographic imaging apparatus, by performing, in multiple iterations, the following steps: (i) Using a Back Projection technique to produce an initial tomogram from a set of initial images; (ii) Subjecting said initial tomogram to a mathematical filtering operation, thereby producing an adjusted tomogram; (iii) Using a Forward Projection technique on said adjusted tomogram to dissociate it into a set of calculated images; (iv) Repeating steps (i)-(iii) until said calculated images satisfy an acceptance criterion.
Public/Granted literature
- US20170059493A1 NOVEL DATA PROCESSING IN A TOMOGRAPHIC IMAGING APPARATUS Public/Granted day:2017-03-02
Information query