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公开(公告)号：US20170059493A1
公开(公告)日：2017-03-02
申请号：US15215341
申请日：2016-07-20
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li
CPC classification number: G01N23/046 , G01N2223/401 , G01N2223/418 , G01N2223/419 , G06T11/006 , H01J37/26
Abstract: A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for performing a mathematical reconstruction step whereby output from the detector is compiled into a tomographic image of at least part of the specimen, wherein said reconstruction step is performed in multiple iterations, which comprise the following steps: (i) Using a Back Projection technique to produce an initial tomogram from a set of initial images; (ii) Subjecting said initial tomogram to a mathematical filtering operation, thereby producing an adjusted tomogram; (iii) Using a Forward Projection technique on said adjusted tomogram to dissociate it into a set of calculated images; (iv) Repeating steps (i)-(iii) until said calculated images satisfy an acceptance criterion.
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公开(公告)号：US10078057B2
公开(公告)日：2018-09-18
申请号：US15215341
申请日：2016-07-20
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li
IPC: G06K9/00 , G01N23/046 , H01J37/26 , G06T11/00
CPC classification number: G01N23/046 , G01N2223/401 , G01N2223/418 , G01N2223/419 , G06T11/006 , G06T2211/424 , H01J37/26
Abstract: A method of investigating a specimen using a tomographic imaging apparatus, by performing, in multiple iterations, the following steps: (i) Using a Back Projection technique to produce an initial tomogram from a set of initial images; (ii) Subjecting said initial tomogram to a mathematical filtering operation, thereby producing an adjusted tomogram; (iii) Using a Forward Projection technique on said adjusted tomogram to dissociate it into a set of calculated images; (iv) Repeating steps (i)-(iii) until said calculated images satisfy an acceptance criterion.
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公开(公告)号：US20170061610A1
公开(公告)日：2017-03-02
申请号：US15221524
申请日：2016-07-27
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Benoit Recur , Trond Karsten Varslot
CPC classification number: G06T7/0012 , G06T7/30 , G06T11/003 , G06T11/005 , G06T2207/10072
Abstract: A method for investigating a specimen using a tomographic imaging apparatus, comprising acquiring a set of input images of the specimen taken at a corresponding set of source positions that are intended to lie on an ideal locus but are instead caused by positioning errors to lie on a distorted locus, using the images to construct an initial tomographic image, dissociating the initial tomographic image into a set of reference images referenced to said ideal locus, comparing the given input images to the corresponding reference images, calculating a set of transformations necessary to map the input images onto the reference images, and using the set of transformations to construct a modified tomographic image.
Abstract translation: 一种用于使用断层摄影成像装置检查样本的方法，包括获取在旨在位于理想轨迹上的相应的源位置集上拍摄的标本的一组输入图像，但是由定位误差位于 使用图像构建初始层析图像，将初始断层图像解离为参考所述理想轨迹的一组参考图像，将给定的输入图像与相应的参考图像进行比较，计算一组转换，以映射 将图像输入到参考图像上，并使用该组变换来构建修改的断层图像。
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Patent Agency Ranking
4.发明申请NOVEL ACQUISITION AND PROCESSING OF DATA IN A TOMOGRAPHIC IMAGING APPARATUS 审中-公开在图像成像装置中的新闻采集和数据处理公开(公告)号：US20170052264A1
公开(公告)日：2017-02-23
申请号：US15237309
申请日：2016-08-15
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li , Trond Karsten Varslot
CPC classification number: G01T1/2985 , G01N23/046 , G01N23/2204 , G06T11/005 , G06T2211/436 , H01J37/222 , H01J2237/2807
Abstract: A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.
Abstract translation: 使用使用用于产生源相对于样本的相对运动的阶段的断层摄影装置来研究样本的方法，以便允许源和检测器沿着一系列不同的观察轴和处理来对样本进行成像 用于组装至少部分样本的断层图像的装置。 考虑到每个所述观察轴与该参考表面的入射点，考虑围绕试样的虚拟参考表面并且基本上位于其上进行调查，从而生成与该系列对应的一组这样的交叉点 的观察轴，选择该系列中的离散观察轴，以便使得该组包括位于基本表面上的基本上均匀分布的点的二维晶格。
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公开(公告)号：US11428828B2
公开(公告)日：2022-08-30
申请号：US16284496
申请日：2019-02-25
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li , Trond Karsten Varslot
IPC: G06T11/00 , G01T1/29 , G01N23/046 , G01N23/2204 , H01J37/22
Abstract: A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen, which method comprises the following steps: Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon; Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes; Choosing discrete viewing axes in said series so as to cause said set to comprise a two-dimensional lattice of points located areally on said reference surface in a substantially uniform distribution.
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公开(公告)号：US20190187306A1
公开(公告)日：2019-06-20
申请号：US16284496
申请日：2019-02-25
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li , Trond Karsten Varslot
IPC: G01T1/29 , G06T11/00 , H01J37/22 , G01N23/2204 , G01N23/046
CPC classification number: G01T1/2985 , G01N23/046 , G01N23/2204 , G06T11/005 , G06T2211/436 , H01J37/222 , H01J2237/2807
Abstract: A method of investigating a specimen using a tomographic imaging apparatus comprising: A specimen holder, for holding the specimen; A source, for producing a beam of radiation that can be directed at the specimen; A detector, for detecting a flux of radiation transmitted through the specimen from the source; A stage apparatus, for producing relative motion of the source with respect to the specimen, so as to allow the source and detector to image the specimen along a series of different viewing axes; A processing apparatus, for assembling output from the detector into a tomographic image of at least part of the specimen, which method comprises the following steps: Considering a virtual reference surface that surrounds the specimen and is substantially centered thereon; Considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to said series of viewing axes; Choosing discrete viewing axes in said series so as to cause said set to comprise a two-dimensional lattice of points located areally on said reference surface in a substantially uniform distribution.
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公开(公告)号：US10254419B2
公开(公告)日：2019-04-09
申请号：US15237309
申请日：2016-08-15
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li , Trond Karsten Varslot
IPC: G01T1/29 , G06T11/00 , G01N23/046 , G01N23/2204 , H01J37/22
Abstract: A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.
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公开(公告)号：US10152785B2
公开(公告)日：2018-12-11
申请号：US15221524
申请日：2016-07-27
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Benoit Recur , Trond Karsten Varslot
Abstract: A method for investigating a specimen using a tomographic imaging apparatus, comprising acquiring a set of input images of the specimen taken at a corresponding set of source positions that are intended to lie on an ideal locus but are instead caused by positioning errors to lie on a distorted locus, using the images to construct an initial tomographic image, dissociating the initial tomographic image into a set of reference images referenced to said ideal locus, comparing the given input images to the corresponding reference images, calculating a set of transformations necessary to map the input images onto the reference images, and using the set of transformations to construct a modified tomographic image.
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