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公开(公告)号：US11175242B2
公开(公告)日：2021-11-16
申请号：US15926621
申请日：2018-03-20
Applicant: FEI Company
Inventor： Andrew Kingston , Olaf Delgado-Friedrichs , Glenn Myers , Shane Latham , Adrian Sheppard , Trond Varslot , Petr St{hacek over (r)}elec
IPC: G06K9/00 , G01N23/046
Abstract: Methods and apparatuses are disclosed herein to correct for inconsistencies in CT scans based on pi-lines. An example method at least includes acquiring a plurality of projections of a sample, each projection of the plurality of projections acquired at a different location around the sample based on a trajectory, determining pairs of opposing projections from the plurality of projections based on a respective pi-line, and determining an amount of inconsistency between respective pi-line data for each pair of opposing projections, where the pi-line data is based, at least in part, on attenuation data.
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公开(公告)号：US10078057B2
公开(公告)日：2018-09-18
申请号：US15215341
申请日：2016-07-20
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li
IPC: G06K9/00 , G01N23/046 , H01J37/26 , G06T11/00
CPC classification number: G01N23/046 , G01N2223/401 , G01N2223/418 , G01N2223/419 , G06T11/006 , G06T2211/424 , H01J37/26
Abstract: A method of investigating a specimen using a tomographic imaging apparatus, by performing, in multiple iterations, the following steps: (i) Using a Back Projection technique to produce an initial tomogram from a set of initial images; (ii) Subjecting said initial tomogram to a mathematical filtering operation, thereby producing an adjusted tomogram; (iii) Using a Forward Projection technique on said adjusted tomogram to dissociate it into a set of calculated images; (iv) Repeating steps (i)-(iii) until said calculated images satisfy an acceptance criterion.
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公开(公告)号：US11821852B2
公开(公告)日：2023-11-21
申请号：US17490261
申请日：2021-09-30
Applicant: FEI Company
Inventor： Andrew M. Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Trond Karsten Varslot
IPC: G01N23/00 , G01N23/046 , G06T11/00
CPC classification number: G01N23/046 , G06T11/008 , G01N2223/418
Abstract: A method of investigating a specimen using tomographic imaging, comprising the steps of providing a specimen and a source, directing a beam of radiation from said source to said specimen, and detecting a flux of radiation transmitted through said specimen. The method further comprises the steps of moving at least one of said specimen and said source for providing relative motion of the source with respect to the specimen; and imaging the specimen along a series of different viewing axes, which intersect a virtual reference surface that surrounds the specimen and is substantially centered thereon, wherein said combined steps of moving and imaging generate a sampling geometry on said virtual reference surface. As defined herein, the steps of moving and imaging are coordinated in such a way that said sampling geometry comprises a plurality of spaced apart line segments.
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公开(公告)号：US20230103037A1
公开(公告)日：2023-03-30
申请号：US17958110
申请日：2022-09-30
Applicant: FEI Company
Inventor： Glenn Myers , Andrew Kingston , Adrian Sheppard , Shane Latham , Trond Varslot
IPC: G06T11/00
Abstract: Methods and systems for generation and use of an accelerated tomographic reconstruction preconditioner (ATRP) for accelerated iterative tomographic reconstruction are disclosed. An example method for generating an ATRP for accelerated iterative tomographic reconstruction includes accessing data for a tomography investigation of a sample and determining a trajectory of the tomography investigation of a sample. At least one toy model sample depicting a feature characteristic of the sample are accessed and at least one candidate preconditioner is selected. A first performance of each of the at least one candidate preconditioner on the one or more toy samples is determined, where the candidate preconditioners are then updated to create updated candidate preconditioners. A second performance of each of the updated candidate preconditioners on the one or more toy samples is determined determining. An ATRP is then generated based on at least the first performance and the second performance.
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公开(公告)号：US10902650B2
公开(公告)日：2021-01-26
申请号：US16110264
申请日：2018-08-23
Applicant: FEI Company
Inventor： Qiheng Yang , Glenn Myers , Shane Latham , Adrian Sheppard , Andrew Kingston
IPC: G06T11/00 , G01N23/046
Abstract: Methods and apparatuses disclosed herein provide beam hardening correction to tomographic reconstruction using a simplification to the Alvarez-Macovski attenuation model. An example method includes simplifying a forward projection model, the forward projection model based on an Alvarez-Macovski (AM) attenuation model, wherein the simplification of the forward projection model simplifies the AM attenuation model for one of photoelectric effect only, constant density, constant atomic number, and density proportional to atomic number, and performing an iterative reconstruction of a sample using the simplified forward projection model, the iterative reconstruction weighted by a first spectrum, wherein measured image data of the sample used in the iterative reconstruction is obtained at a first energy, and wherein a reverse operation of the iterative reconstruction is a non-adjoint to the simplified forward projection model.
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Patent Agency Ranking
公开(公告)号：US20220099600A1
公开(公告)日：2022-03-31
申请号：US17490261
申请日：2021-09-30
Applicant: FEI Company
Inventor： Andrew M. Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Trond Karsten Varslot
IPC: G01N23/046 , G06T11/00
Abstract: A method of investigating a specimen using tomographic imaging, comprising the steps of providing a specimen and a source, directing a beam of radiation from said source to said specimen, and detecting a flux of radiation transmitted through said specimen. The method further comprises the steps of moving at least one of said specimen and said source for providing relative motion of the source with respect to the specimen; and imaging the specimen along a series of different viewing axes, which intersect a virtual reference surface that surrounds the specimen and is substantially centered thereon, wherein said combined steps of moving and imaging generate a sampling geometry on said virtual reference surface. As defined herein, the steps of moving and imaging are coordinated in such a way that said sampling geometry comprises a plurality of spaced apart line segments.
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公开(公告)号：US20170061610A1
公开(公告)日：2017-03-02
申请号：US15221524
申请日：2016-07-27
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Benoit Recur , Trond Karsten Varslot
CPC classification number: G06T7/0012 , G06T7/30 , G06T11/003 , G06T11/005 , G06T2207/10072
Abstract: A method for investigating a specimen using a tomographic imaging apparatus, comprising acquiring a set of input images of the specimen taken at a corresponding set of source positions that are intended to lie on an ideal locus but are instead caused by positioning errors to lie on a distorted locus, using the images to construct an initial tomographic image, dissociating the initial tomographic image into a set of reference images referenced to said ideal locus, comparing the given input images to the corresponding reference images, calculating a set of transformations necessary to map the input images onto the reference images, and using the set of transformations to construct a modified tomographic image.
Abstract translation: 一种用于使用断层摄影成像装置检查样本的方法，包括获取在旨在位于理想轨迹上的相应的源位置集上拍摄的标本的一组输入图像，但是由定位误差位于 使用图像构建初始层析图像，将初始断层图像解离为参考所述理想轨迹的一组参考图像，将给定的输入图像与相应的参考图像进行比较，计算一组转换，以映射 将图像输入到参考图像上，并使用该组变换来构建修改的断层图像。
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8.发明申请NOVEL ACQUISITION AND PROCESSING OF DATA IN A TOMOGRAPHIC IMAGING APPARATUS 审中-公开在图像成像装置中的新闻采集和数据处理公开(公告)号：US20170052264A1
公开(公告)日：2017-02-23
申请号：US15237309
申请日：2016-08-15
Applicant: FEI Company
Inventor： Andrew Kingston , Shane Latham , Adrian Sheppard , Glenn Myers , Benoit Recur , Heyang Li , Trond Karsten Varslot
CPC classification number: G01T1/2985 , G01N23/046 , G01N23/2204 , G06T11/005 , G06T2211/436 , H01J37/222 , H01J2237/2807
Abstract: A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.
Abstract translation: 使用使用用于产生源相对于样本的相对运动的阶段的断层摄影装置来研究样本的方法，以便允许源和检测器沿着一系列不同的观察轴和处理来对样本进行成像 用于组装至少部分样本的断层图像的装置。 考虑到每个所述观察轴与该参考表面的入射点，考虑围绕试样的虚拟参考表面并且基本上位于其上进行调查，从而生成与该系列对应的一组这样的交叉点 的观察轴，选择该系列中的离散观察轴，以便使得该组包括位于基本表面上的基本上均匀分布的点的二维晶格。
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公开(公告)号：US12260473B2
公开(公告)日：2025-03-25
申请号：US17958110
申请日：2022-09-30
Applicant: FEI Company
Inventor： Glenn Myers , Andrew Kingston , Adrian Sheppard , Shane Latham , Trond Varslot
Abstract: Methods and systems for generation and use of an accelerated tomographic reconstruction preconditioner (ATRP) for accelerated iterative tomographic reconstruction are disclosed. An example method for generating an ATRP for accelerated iterative tomographic reconstruction includes accessing data for a tomography investigation of a sample and determining a trajectory of the tomography investigation of a sample. At least one toy model sample depicting a feature characteristic of the sample are accessed and at least one candidate preconditioner is selected. A first performance of each of the at least one candidate preconditioner on the one or more toy samples is determined, where the candidate preconditioners are then updated to create updated candidate preconditioners. A second performance of each of the updated candidate preconditioners on the one or more toy samples is determined determining. An ATRP is then generated based on at least the first performance and the second performance.
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公开(公告)号：US11009449B2
公开(公告)日：2021-05-18
申请号：US16359352
申请日：2019-03-20
Applicant: FEI Company
Inventor： Glenn Myers , Shane Latham , Adrian Sheppard , Olaf Delgado-Friedrichs , Andrew Kingston
Abstract: Apparatuses and methods for implementing scanning trajectories for ROI tomography are disclosed herein. An example method includes determining a first focus object distance based on a circumradius of a sample, the sample including a region of interest, determining a second focus object distance based on a radius of a smallest cylinder that contains the region of interest, determining a plurality of viewing angles from a plurality of possible viewing angles in response to the first focus object distance, where each viewing angle of the plurality of viewing angles has an associated focus object distance measured from the region of interest, and where the associated focus object distance of each of the plurality of viewing angles is less than the first focus object distance and greater than the second focus object distance, and scanning the region of interest using at least the plurality of viewing angles.
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