Invention Grant
- Patent Title: Noncontact metrology probe, process for making and using same
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Application No.: US14930685Application Date: 2015-11-03
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Publication No.: US10078898B2Publication Date: 2018-09-18
- Inventor: Joshua Gordon
- Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
- Applicant Address: US MD Gaithersburg
- Assignee: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
- Current Assignee: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY
- Current Assignee Address: US MD Gaithersburg
- Agency: Office of Chief Counsel for National Institute of Standards and Technology
- Main IPC: G06T7/00
- IPC: G06T7/00 ; G01B21/04 ; G01B11/245 ; G06T7/80

Abstract:
Disclosed is a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view and arranged such that the second field of view overlaps the first field of view to form a prime focal volume; a third camera including a third field of view and arranged such that the third field of view overlaps the prime focal volume to form a probe focal volume; and a tracker including a tracker field of view to determine a location of the probe focal volume in the tracker field of view. Further disclosed is a process for calibrating a noncontact metrology probe, the process including: providing a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view; a third camera including a third field of view; and a tracker including a tracker field of view; overlapping the first field of view with the second field of view to form a prime focal volume; overlapping the prime focal volume with the third field of view to form a probe focal volume; and overlapping the a tracker field of view with the probe focal volume to calibrate the noncontact metrology probe.
Public/Granted literature
- US20160071272A1 NONCONTACT METROLOGY PROBE, PROCESS FOR MAKING AND USING SAME Public/Granted day:2016-03-10
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