公开(公告)号：US10078898B2

公开(公告)日：2018-09-18

申请号：US14930685

申请日：2015-11-03

Applicant: NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY

Inventor： Joshua Gordon

IPC: G06T7/00 ,  G01B21/04 ,  G01B11/245 ,  G06T7/80

CPC classification number: G06T7/80 ,  G01B11/245 ,  G01B21/042 ,  G06T2207/20088 ,  G06T2207/30204

Abstract: Disclosed is a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view and arranged such that the second field of view overlaps the first field of view to form a prime focal volume; a third camera including a third field of view and arranged such that the third field of view overlaps the prime focal volume to form a probe focal volume; and a tracker including a tracker field of view to determine a location of the probe focal volume in the tracker field of view. Further disclosed is a process for calibrating a noncontact metrology probe, the process including: providing a noncontact metrology probe including: a first camera including a first field of view; a second camera including a second field of view; a third camera including a third field of view; and a tracker including a tracker field of view; overlapping the first field of view with the second field of view to form a prime focal volume; overlapping the prime focal volume with the third field of view to form a probe focal volume; and overlapping the a tracker field of view with the probe focal volume to calibrate the noncontact metrology probe.