Invention Grant
- Patent Title: Ion sources and methods for generating ion beams with controllable ion current density distributions over large treatment areas
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Application No.: US15170570Application Date: 2016-06-01
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Publication No.: US10128083B2Publication Date: 2018-11-13
- Inventor: Boris Druz , Rustam Yevtukhov , Robert Hieronymi , Alan V. Hayes , Mathew Levoso , Peter Porshnev
- Applicant: Veeco Instruments Inc.
- Applicant Address: US NY Fairview
- Assignee: VEBCO INSTRUMENTS INC.
- Current Assignee: VEBCO INSTRUMENTS INC.
- Current Assignee Address: US NY Fairview
- Agency: Holzer Patel Drennan
- Main IPC: H01J37/08
- IPC: H01J37/08 ; H01J37/305 ; H01J27/18
Abstract:
The presently disclosed ion sources include one or more electromagnets for changing the distribution of plasma within a discharge space of an ion source. At least one of the electromagnets is oriented about an outer periphery of a tubular sidewall of the ion source and changes a distribution of the plasma in a peripheral region of the discharge space.
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