Invention Grant
- Patent Title: Scanning electron microscope
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Application No.: US15123828Application Date: 2015-02-04
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Publication No.: US10134558B2Publication Date: 2018-11-20
- Inventor: Yasunari Sohda , Takeyoshi Ohashi , Takafumi Miwa , Noritsugu Takahashi , Hajime Kawano
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2014-045311 20140307
- International Application: PCT/JP2015/053033 WO 20150204
- International Announcement: WO2015/133214 WO 20150911
- Main IPC: H01J37/05
- IPC: H01J37/05 ; H01J37/29 ; H01J37/21 ; H01J37/28 ; H01J37/145 ; H01J37/26

Abstract:
A scanning electron microscope according to the present invention includes: an electron source that produces an electron beam; a trajectory dispersion unit that disperses the trajectory of an electron beam of electrons with a different energy value; a selection slit plate having a selection slit that selects the energy range of the dispersed electron beam; and a transmittance monitoring unit that monitors the transmittance of an electron beam, which is being transmitted through the selection slit. Accordingly, there can be provided a scanning electron microscope equipped with an energy filter that implements a stable reduction in energy distribution.
Public/Granted literature
- US20170018394A1 Scanning Electron Microscope Public/Granted day:2017-01-19
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