Invention Grant
- Patent Title: Drawing data creation method and charged particle beam drawing apparatus
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Application No.: US15203994Application Date: 2016-07-07
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Publication No.: US10199199B2Publication Date: 2019-02-05
- Inventor: Shigehiro Hara , Kenichi Yasui , Yasuo Kato
- Applicant: NUFLARE TECHNOLOGY, INC.
- Applicant Address: JP Yokohama-shi
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama-shi
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2015-142262 20150716
- Main IPC: H01J37/302
- IPC: H01J37/302 ; H01J37/317

Abstract:
In one embodiment, a drawing data creation method includes inputting correction-map-including drawing data having a correction map to a converter, the correction map including dose amount information for each mesh area obtained by dividing a drawing area on a target drawn by a charged particle beam drawing apparatus, the drawing area being divided in a mesh shape, converting dose amount information in a second mesh area adjacent to a first mesh area to a representation based on dose amount information in the first mesh area to compress data of the dose amount information in the second mesh area, and outputting compressed-correction-map-including drawing data having a compressed correction map to a controller, the compressed correction map including dose amount information in which data in each of the plurality of mesh areas has been compressed.
Public/Granted literature
- US20170018404A1 DRAWING DATA CREATION METHOD AND CHARGED PARTICLE BEAM DRAWING APPARATUS Public/Granted day:2017-01-19
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