Invention Grant
- Patent Title: Operation of an electromagnetic radiation focusing element
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Application No.: US14545713Application Date: 2015-06-09
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Publication No.: US10209528B1Publication Date: 2019-02-19
- Inventor: Martin M. Liphardt
- Applicant: J.A. WOOLLAM CO., INC.
- Applicant Address: US NE Lincoln
- Assignee: J.A. WOOLLAM CO., INC.
- Current Assignee: J.A. WOOLLAM CO., INC.
- Current Assignee Address: US NE Lincoln
- Agent James D. Welch
- Main IPC: G01J4/00
- IPC: G01J4/00 ; G02B27/09 ; G02B5/20 ; G01J4/04

Abstract:
A combination of a focusing element, and a filtering element which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed through the focusing element as a function of wavelength over a specified range of wavelengths, wherein the filtering element is not uniform, but rather varies as a selection from the group consisting of: optical density and/or thickness is greatest near the center thereof; and optical density and/or thickness is smallest near the center thereof; and can demonstrate neutral density characteristics outside the specified range of wavelengths. The combination of a focusing element, and a filtering element can optionally be present in an ellipsometer or polarimeter system.
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