Invention Grant
- Patent Title: Laser ablation analysis techniques
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Application No.: US15488422Application Date: 2017-04-14
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Publication No.: US10222337B1Publication Date: 2019-03-05
- Inventor: Jong Hyun Yoo , Chunyi Liu , Alexander A. Bol'shakov , Richard E. Russo , Xianglei Mao , Randolph S. Tribe , Osman Sorkhabi
- Applicant: Applied Spectra, Inc.
- Applicant Address: US CA Fremont
- Assignee: Applied Spectra, Inc.
- Current Assignee: Applied Spectra, Inc.
- Current Assignee Address: US CA Fremont
- Agency: Microtechnology Law & Analysis
- Agent Daniel L. Flamm
- Main IPC: G01J3/30
- IPC: G01J3/30 ; G01N21/71 ; B23K26/04 ; H01J49/04 ; H01J49/10

Abstract:
Methods for laser induced ablation spectroscopy are disclosed. A position sensor, and position motors can move a sample stage in three independent spatial coordinate directions, and a stage position control circuit can move an analysis sample site to selected coordinate positions for ablation. Light from laser ablation can be gathered into a lightguide fiber bundle that is subdivided into branches. One branch can convey a first portion of the light to a broadband spectrometer operable to analyze a relatively wide spectral segment, and a different branch can convey a second portion of the light to a high dispersion spectrometer operable to measure minor concentrations and/or trace elements. Emissions can be simultaneously analyzed in various ways using a plurality of spectrometers having distinct and/or complementary capabilities, and isotope analysis of a sample can be performed.
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