Invention Grant
- Patent Title: High rate electric field driven nanoelement assembly on an insulated surface
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Application No.: US15350636Application Date: 2016-11-14
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Publication No.: US10233559B2Publication Date: 2019-03-19
- Inventor: Asli Sirman , Ahmed Busnaina , Cihan Yilmaz , Jun Huang , Sivasubramanian Somu
- Applicant: Northeastern University
- Applicant Address: US MA Boston
- Assignee: Northeastern University
- Current Assignee: Northeastern University
- Current Assignee Address: US MA Boston
- Agency: Arent Fox LLP
- Main IPC: C25D13/22
- IPC: C25D13/22 ; H05K1/03 ; H05K1/09 ; H05K3/12 ; C25D13/12 ; C25D13/04 ; C25D13/20 ; C09D5/44 ; C09D125/06 ; B82Y40/00 ; H05K1/02 ; H01L21/02 ; H01L29/06 ; B82Y30/00

Abstract:
A method for high rate assembly of nanoelements into two-dimensional void patterns on a non-conductive substrate surface utilizes an applied electric field to stabilize against forces resulting from pulling the substrate through the surface of a nanoelement suspension. The electric field contours emanating from a conductive layer in the substrate, covered by an insulating layer, are modified by a patterned photoresist layer, resulting in an increased driving force for nanoelements to migrate from a liquid suspension to voids on a patterned substrate having a non-conductive surface. The method can be used for the production of microscale and nanoscale circuits, sensors, and other electronic devices.
Public/Granted literature
- US20170058422A1 High Rate Electric Field Driven Nanoelement Assembly on an Insulated Surface Public/Granted day:2017-03-02
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