Invention Grant
- Patent Title: System and method for electrodeless plasma ignition in laser-sustained plasma light source
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Application No.: US15280073Application Date: 2016-09-29
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Publication No.: US10244613B2Publication Date: 2019-03-26
- Inventor: Anant Chimmalgi , Rudolf Brunner , Anatoly Shchemelinin , Ilya Bezel , Erik Kim , Rajeev Patil
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: A61N5/06
- IPC: A61N5/06 ; H05G2/00 ; H01J65/04 ; G02B6/42 ; H01J61/02 ; H01J61/54

Abstract:
An illumination source for igniting and sustaining a plasma in a plasma lamp of a laser-sustained plasma (LSP) broadband source includes one or more ignition lasers configured to ignite the plasma within a gas contained within the plasma lamp. The illumination sources also include one or more sustaining lasers configured to sustain the plasma. The illumination sources include a delivery optical fiber, one or more optical elements configured to selectively optically couple an output of the one or more ignition lasers, and an output of the one or more sustaining lasers to the delivery optical fiber.
Public/Granted literature
- US20170150590A1 System and Method for Electrodeless Plasma Ignition in Laser-Sustained Plasma Light Source Public/Granted day:2017-05-25
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